One-side-electrode-type fluid-based inclinometer combined with CMOS circuitry

Asrulnizam Bin Abd Manaf, Kazumasa Nakamura, Junpei Onishi, Yoshinori Matsumoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

In this study, electrical double layer theory is applied to realize one-side-electrode-type fluid-based inclinometer combined with CMOS circuitry. Charge-balanced capacitance-voltage conversion (C-V converter) circuit was designed as detection circuit and it was fabricated using 0.35 μm CMOS process. The sensor design and substrate penetration lithography method are demonstrated in sensor fabrication, and experiment to find a proper fluid for this application was implemented.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages844-847
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period07/10/2807/10/31

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Manaf, A. B. A., Nakamura, K., Onishi, J., & Matsumoto, Y. (2007). One-side-electrode-type fluid-based inclinometer combined with CMOS circuitry. In The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 (pp. 844-847). [4388533] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388533