Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures

Y. Miyoshi, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

52 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF<sub>4</sub> mixtures'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds