Optical emission spectroscopy of pulsed inductively coupled plasma in Ar

Kazuya Hioki, Naoki Itazu, Zoran Lj Petrovic, Toshiaki Makabe

Research output: Contribution to journalLetter

11 Citations (Scopus)

Abstract

Optical emission spectroscopy has been used to study the properties of pulsed inductively coupled plasma in Ar. Both spatially resolved computerized tomography and time resolved spectroscopy have been applied. In the range between 5 mTorr and 300 mTorr, it was found that the ratio of time averaged excited state densities in pulsed and CW conditions increases from 1:3 to 3:4. This is larger than the 1:2 ratio which may be expected from the duty cycle. The variation of the emission in the OFF period requires excitation during that period, and its time dependence may be understood by following the decay of the density and mean energy of electrons, and the decay of the metastable density. In the pulsed mode the radial uniformity is generally improved at lower and slightly worse at higher pressures.

Original languageEnglish
Pages (from-to)L1183-L1186
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume40
Issue number11 A
DOIs
Publication statusPublished - 2001 Nov 1

Keywords

  • Emission selected CT-image
  • Plasma structure
  • Pulsed-ICP in Ar
  • Radon/Abel inversion
  • Time-resolved spectroscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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