Optical Imaging of Defect Density Distribution in Ion-Implanted GaAs using Ultrafast Carrier Dynamics

Yasutaka Fujii, Kohei Horiuchi, Fumihiko Kannari, Muneaki Hase, Masahiro Kitajima

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

By combining time-resolved pump-probe reflectivity measurements with scanning laser microscopy, we demonstrate microscopic two-dimensional (2D) imaging of defect density distribution on a GaAs surface. The carrier lifetime is significantly reduced by the recombination process through defect states introduced by 5-keV He+ ion implantation. Thus, when plotting the probe beam reflectivity at 1 ps after photoexcitation and scanning the probe beam across the GaAs surface at a spatial resolution of 2 μm with a scanning step of 10 μm, we obtain a clear image of defect distribution corresponding to a mask edge pattern placed on the sample during ion implantation. Clearer images can be obtained using longer wavelength probe light.

Original languageEnglish
Pages (from-to)184-185
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number1
Publication statusPublished - 2004 Jan

Fingerprint

Defect density
density distribution
Imaging techniques
scanning
ion implantation
probes
defects
Ions
Scanning
Ion implantation
laser microscopy
reflectance
ions
plotting
carrier lifetime
photoexcitation
light beams
Defects
Carrier lifetime
Photoexcitation

Keywords

  • Carrier lifetime
  • Defect profile
  • Femtosecond laser pulse
  • Microscopic reflectometry
  • Pump-probe measurement

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Optical Imaging of Defect Density Distribution in Ion-Implanted GaAs using Ultrafast Carrier Dynamics. / Fujii, Yasutaka; Horiuchi, Kohei; Kannari, Fumihiko; Hase, Muneaki; Kitajima, Masahiro.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 1, 01.2004, p. 184-185.

Research output: Contribution to journalArticle

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