Abstract
Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.
| Original language | English |
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| Publication status | Published - 2009 Dec 1 |
| Externally published | Yes |
| Event | 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan Duration: 2009 Dec 2 → 2009 Dec 4 |
Other
| Other | 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 |
|---|---|
| Country/Territory | Japan |
| City | Osaka |
| Period | 09/12/2 → 09/12/4 |
Keywords
- Compensation grinding
- Nano-topography
- Ultra-precision grinding
- Vibration
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering