Optimization of grinding conditions utilizing nano-topography distribution analysis

Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Contribution to conferencePaperpeer-review

Abstract

Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.

Original languageEnglish
Publication statusPublished - 2009 Dec 1
Externally publishedYes
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: 2009 Dec 22009 Dec 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period09/12/209/12/4

Keywords

  • Compensation grinding
  • Nano-topography
  • Ultra-precision grinding
  • Vibration

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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