Fingerprint
Dive into the research topics of 'O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing
Mari Shibata, Nobuhiko Nakano, Toshiaki Makabe
Research output: Contribution to journal › Article › peer-review
68
Citations
(Scopus)