Out-of-plane actuation with a sub-micron initial gap for reconfigurable terahertz micro-electromechanical systems metamaterials

Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

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Physics & Astronomy