Patterned carbon nanotube films formed by surface decomposition of SiC wafers

Michiko Kusunoki, Toshiyuki Suzuki, Chizuru Honjo, Craig Fisher, Tsukasa Hirayama, Mizuhisa Nihei, Yuji Awano

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Well-aligned carbon nanotubes (CNTs) have been formed selectively on SiC wafers by a surface decomposition method. A SiC(000-l)C-face wafer was patterned with amorphous SiN deposited by a photoresist method used in the silicon semiconductor process, after which the wafer was heated at 1500°C for half an hour in a vacuum. Transmission electron microscopy revealed that 50-nm-long aligned CNTs were formed only at the open areas of the mask. The mask was removed entirely before reaching 1500°C, and a thin graphite layer 6.8 nm thick was formed at the naked SiC surface. This demonstration of the selective growth of CNTs suggests that this surface decomposition method has the potential to be used for the development of nanotube devices integrated into silicon technology.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume42
Issue number12 A
Publication statusPublished - 2003 Dec 1
Externally publishedYes

Fingerprint

Carbon nanotubes
carbon nanotubes
wafers
Decomposition
decomposition
Masks
masks
Silicon
silicon
Photoresists
photoresists
Nanotubes
nanotubes
Graphite
Demonstrations
graphite
Vacuum
Semiconductor materials
Transmission electron microscopy
vacuum

Keywords

  • Alignment
  • Carbon nanotube
  • Patterning
  • SiC
  • Surface decomposition

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Kusunoki, M., Suzuki, T., Honjo, C., Fisher, C., Hirayama, T., Nihei, M., & Awano, Y. (2003). Patterned carbon nanotube films formed by surface decomposition of SiC wafers. Japanese Journal of Applied Physics, Part 2: Letters, 42(12 A).

Patterned carbon nanotube films formed by surface decomposition of SiC wafers. / Kusunoki, Michiko; Suzuki, Toshiyuki; Honjo, Chizuru; Fisher, Craig; Hirayama, Tsukasa; Nihei, Mizuhisa; Awano, Yuji.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 42, No. 12 A, 01.12.2003.

Research output: Contribution to journalArticle

Kusunoki, M, Suzuki, T, Honjo, C, Fisher, C, Hirayama, T, Nihei, M & Awano, Y 2003, 'Patterned carbon nanotube films formed by surface decomposition of SiC wafers', Japanese Journal of Applied Physics, Part 2: Letters, vol. 42, no. 12 A.
Kusunoki M, Suzuki T, Honjo C, Fisher C, Hirayama T, Nihei M et al. Patterned carbon nanotube films formed by surface decomposition of SiC wafers. Japanese Journal of Applied Physics, Part 2: Letters. 2003 Dec 1;42(12 A).
Kusunoki, Michiko ; Suzuki, Toshiyuki ; Honjo, Chizuru ; Fisher, Craig ; Hirayama, Tsukasa ; Nihei, Mizuhisa ; Awano, Yuji. / Patterned carbon nanotube films formed by surface decomposition of SiC wafers. In: Japanese Journal of Applied Physics, Part 2: Letters. 2003 ; Vol. 42, No. 12 A.
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