Performance improvement by stress memorization technique in trigate silicon nanowire MOSFETs

Masumi Saitoh, Yukio Nakabayashi, Kensuke Ota, Ken Uchida, Toshinori Numata

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Performance improvement by stress memorization technique in trigate silicon nanowire MOSFETs'. Together they form a unique fingerprint.

    Chemical Compounds

    Engineering & Materials Science