Plasma impedance prediction model and impedance matching by frequency tuning in radio frequency negative ion sources

W. Kobayashi, K. Nishida, S. Mattei, J. Lettry, A. Hatayama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A radio frequency (RF) driven type hydrogen (H-) source is used as an injector of Linac4. The power transfer efficiency between the RF generator and the ion source plasma is one of the important parameters that determines the extracted H- beam current. In order to achieve efficient power transfer, it is required to match the impedance between the RF-system and plasma loading. Aiming to investigate the optimum frequency tuning, we have developed a plasma impedance prediction model. The results indicate that the amount of the power supplied to the plasma increases by tuning the frequency adequately. The model developed in the present study is useful to optimize the power transfer by the dynamic frequency tuning and can also be used for the analysis of other inductively coupled plasma (ICP) reactors.

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference on Ion Sources
EditorsEdgar Mahner, Richard Scrivens, Richard Pardo, Jacques Lettry, Bruce Marsh
PublisherAmerican Institute of Physics Inc.
ISBN (Print)9780735417274
DOIs
Publication statusPublished - 2018 Sep 21
Event17th International Conference on Ion Sources 2018 - Geneva, Switzerland
Duration: 2017 Sep 152017 Sep 20

Publication series

NameAIP Conference Proceedings
Volume2011
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other17th International Conference on Ion Sources 2018
CountrySwitzerland
CityGeneva
Period17/9/1517/9/20

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Kobayashi, W., Nishida, K., Mattei, S., Lettry, J., & Hatayama, A. (2018). Plasma impedance prediction model and impedance matching by frequency tuning in radio frequency negative ion sources. In E. Mahner, R. Scrivens, R. Pardo, J. Lettry, & B. Marsh (Eds.), Proceedings of the 17th International Conference on Ion Sources [050019] (AIP Conference Proceedings; Vol. 2011). American Institute of Physics Inc.. https://doi.org/10.1063/1.5053317