Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Koji Mishima, Masaomi Yamamoto, Yasuhiro Kakinuma, Tojiro Aoyama

Research output: Contribution to conferencePaper

Abstract

Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

Original languageEnglish
Publication statusPublished - 2009 Dec 1
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: 2009 Dec 22009 Dec 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period09/12/209/12/4

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Keywords

  • μ-TAS
  • 3D shaped channel
  • Cryogenic micromachining
  • Microfluidic chip
  • PDMS

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Mishima, K., Yamamoto, M., Kakinuma, Y., & Aoyama, T. (2009). Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.