Prediction of a radial variation of plasma structure and ion distributions in the wafer interface in two-frequency capacitively coupled plasma

Takashi Yagisawa, Kazunobu Maeshige, Takashi Shimada, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Prediction of a radial variation of plasma structure and ion distributions in the wafer interface in two-frequency capacitively coupled plasma'. Together they form a unique fingerprint.

Physics & Astronomy