Prediction of the evolution of the erosion profile in a direct current magnetron discharge

Katsunori Okazawa, Eiji Shidoji, Toshiaki Makabe

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

We have performed a simulation of ion and fast neutral transport in the sheath region of a direct current magnetron discharge under different pressures by using the Boltzmann equation and the database from the two-dimensional (2D) results of a plasma structure, which was given by a hybrid model. Evolution of the erosion profile on the target surface has been predicted by using the 2D energy distributions of ions and fast neutrals incident on the target (cathode) surface. We confirmed that an accurate prediction of the erosion profile can be obtained by assuming that the constant sputtering yield corresponds to the cathode voltage under conditions of low pressures that make use of the film deposition processes.

Original languageEnglish
Pages (from-to)2984-2989
Number of pages6
JournalJournal of Applied Physics
Volume86
Issue number6
Publication statusPublished - 1999 Sep

Fingerprint

erosion
cathodes
direct current
profiles
predictions
sheaths
energy distribution
ions
low pressure
sputtering
electric potential
simulation

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Prediction of the evolution of the erosion profile in a direct current magnetron discharge. / Okazawa, Katsunori; Shidoji, Eiji; Makabe, Toshiaki.

In: Journal of Applied Physics, Vol. 86, No. 6, 09.1999, p. 2984-2989.

Research output: Contribution to journalArticle

Okazawa, Katsunori ; Shidoji, Eiji ; Makabe, Toshiaki. / Prediction of the evolution of the erosion profile in a direct current magnetron discharge. In: Journal of Applied Physics. 1999 ; Vol. 86, No. 6. pp. 2984-2989.
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