Abstract
We have performed a simulation of ion and fast neutral transport in the sheath region of a direct current magnetron discharge under different pressures by using the Boltzmann equation and the database from the two-dimensional (2D) results of a plasma structure, which was given by a hybrid model. Evolution of the erosion profile on the target surface has been predicted by using the 2D energy distributions of ions and fast neutrals incident on the target (cathode) surface. We confirmed that an accurate prediction of the erosion profile can be obtained by assuming that the constant sputtering yield corresponds to the cathode voltage under conditions of low pressures that make use of the film deposition processes.
| Original language | English |
|---|---|
| Pages (from-to) | 2984-2989 |
| Number of pages | 6 |
| Journal | Journal of Applied Physics |
| Volume | 86 |
| Issue number | 6 |
| Publication status | Published - 1999 Sep |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
- Physics and Astronomy (miscellaneous)
Cite this
Prediction of the evolution of the erosion profile in a direct current magnetron discharge. / Okazawa, Katsunori; Shidoji, Eiji; Makabe, Toshiaki.
In: Journal of Applied Physics, Vol. 86, No. 6, 09.1999, p. 2984-2989.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Prediction of the evolution of the erosion profile in a direct current magnetron discharge
AU - Okazawa, Katsunori
AU - Shidoji, Eiji
AU - Makabe, Toshiaki
PY - 1999/9
Y1 - 1999/9
N2 - We have performed a simulation of ion and fast neutral transport in the sheath region of a direct current magnetron discharge under different pressures by using the Boltzmann equation and the database from the two-dimensional (2D) results of a plasma structure, which was given by a hybrid model. Evolution of the erosion profile on the target surface has been predicted by using the 2D energy distributions of ions and fast neutrals incident on the target (cathode) surface. We confirmed that an accurate prediction of the erosion profile can be obtained by assuming that the constant sputtering yield corresponds to the cathode voltage under conditions of low pressures that make use of the film deposition processes.
AB - We have performed a simulation of ion and fast neutral transport in the sheath region of a direct current magnetron discharge under different pressures by using the Boltzmann equation and the database from the two-dimensional (2D) results of a plasma structure, which was given by a hybrid model. Evolution of the erosion profile on the target surface has been predicted by using the 2D energy distributions of ions and fast neutrals incident on the target (cathode) surface. We confirmed that an accurate prediction of the erosion profile can be obtained by assuming that the constant sputtering yield corresponds to the cathode voltage under conditions of low pressures that make use of the film deposition processes.
UR - http://www.scopus.com/inward/record.url?scp=0000946803&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0000946803&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0000946803
VL - 86
SP - 2984
EP - 2989
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 6
ER -