Preparation of graded-morphology diamond thin films

Yasuaki Einaga, Gyu Sik Kim, Keisuke Ohnishi, Soo Gil Park, Akira Fujishima

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Graded-morphology diamond thin films were prepared in a single experimental run using a simple technique during the chemical vapor deposition (CVD) process: one end of the substrate was elevated. We showed that the substrate temperature had a profound effect on the morphology and grain size of the as-deposited lightly boron-doped diamond films. We have discussed the morphological dependence of electrochemical properties as one example of the excellent function of the graded film.

Original languageEnglish
Pages (from-to)19-23
Number of pages5
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume83
Issue number1-3
DOIs
Publication statusPublished - 2001 Jun 21
Externally publishedYes

Keywords

  • Diamond thin film
  • Electrochemistry
  • Graded-morphology

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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