Process variants for Cu(In1-xGax)Se2 deposition investigated by in situ spectroscopic light scattering

Keiichiro Sakurai, Roland Scheer, Christian A. Kaufmann, Akimasa Yamada, Paul Fons, Yasuyuki Kimura, Tomoyuki Baba, Koji Matsubara, H. Nakanishi, Shigeru Niki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have applied in situ diffuse spectroscopic light scattering (SLS) to the three-stage deposition process of polycrystalline Cu(In1-xGa x)Se2 (CIGSe) thin films. The process has been studied by systematic variation of the major process parameters of CIGSe, such as (1) substrate temperature and (2) Ga concentration. SLS signals in the wavelength range of 400 - 800 nm has been used in order to derive the development of surface roughness during growth. SLS was found to be more sensitive to near-surface compositions than the conventional temperature monitoring techniques. Emergence of a Cu-rich phase at the surface before the stoichiometry point was observed by SLS. Optimum conditions for smoother CIGSe surfaces has been proposed for each process parameter.

Original languageEnglish
Title of host publicationProceddings of the 3rd World Conference on Photovoltaic Energy Conversion
EditorsK. Kurokawa, L.L. Kazmerski, B. McNeils, M. Yamaguchi, C. Wronski
Pages384-387
Number of pages4
Publication statusPublished - 2003 Dec 1
Externally publishedYes
EventProceddings of the 3rd World Conference on Photovoltaic Energy Conversion - Osaka, Japan
Duration: 2003 May 112003 May 18

Publication series

NameProceedings of the 3rd World Conference on Photovoltaic Energy Conversion
VolumeA

Conference

ConferenceProceddings of the 3rd World Conference on Photovoltaic Energy Conversion
CountryJapan
CityOsaka
Period03/5/1103/5/18

Keywords

  • CIGS
  • CuInGaSe
  • In-situ monitoring
  • SLS
  • Surface roughness

ASJC Scopus subject areas

  • Engineering(all)

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    Sakurai, K., Scheer, R., Kaufmann, C. A., Yamada, A., Fons, P., Kimura, Y., Baba, T., Matsubara, K., Nakanishi, H., & Niki, S. (2003). Process variants for Cu(In1-xGax)Se2 deposition investigated by in situ spectroscopic light scattering. In K. Kurokawa, L. L. Kazmerski, B. McNeils, M. Yamaguchi, & C. Wronski (Eds.), Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion (pp. 384-387). (Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion; Vol. A).