TY - JOUR
T1 - Production technology of large-area multicrystalline silicon solar cells
AU - Fujii, Shuich
AU - Fukawa, Yuko
AU - Takahashi, Hiroaki
AU - Inomata, Yosuke
AU - Okada, Kenichi
AU - Fukui, Kenji
AU - Shirasawa, Katsuhiko
N1 - Funding Information:
This work was supported by Ministry of Kinki Trade and Industry of Japan.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2001/1
Y1 - 2001/1
N2 - In 1996 a conversion efficiency of 17.1% had been obtained on 15 cm × 15 cm mc-Si solar cell. In this paper, large-scale production technology of the high-efficiency processing will be discussed. Enlarging reactive ion etching (RIE) equipment size, technology of passivation, and fine contact grid with low resistance by screenprinted metallization, which is firing through PECVD SiN, have been investigated.
AB - In 1996 a conversion efficiency of 17.1% had been obtained on 15 cm × 15 cm mc-Si solar cell. In this paper, large-scale production technology of the high-efficiency processing will be discussed. Enlarging reactive ion etching (RIE) equipment size, technology of passivation, and fine contact grid with low resistance by screenprinted metallization, which is firing through PECVD SiN, have been investigated.
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U2 - 10.1016/S0927-0248(00)00102-1
DO - 10.1016/S0927-0248(00)00102-1
M3 - Article
AN - SCOPUS:0035194772
SN - 0927-0248
VL - 65
SP - 269
EP - 275
JO - Solar Cells
JF - Solar Cells
IS - 1
ER -
