Properties of amorphous carbon films synthesized by atmospheric pressure glow plasma CVD method

Hideyuki Kodama; Satoshi Iizumi; Masaki Nakaya; Akira Shirakura; Atsushi Hotta; Tetsuya Suzuki

doi:10.2494/photopolymer.19.673

Properties of amorphous carbon films synthesized by atmospheric pressure glow plasma CVD method

Hideyuki Kodama, Satoshi Iizumi, Masaki Nakaya, Akira Shirakura, Atsushi Hotta, Tetsuya Suzuki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Amorphous carbon films were synthesized on top of polyethylene terephthalate (PET) substrates using atmospheric-pressure glow (APG) plasma CVD equipment which we originally designed and set up. Plasma was generated between two metal electrodes one of which was covered with a dielectric plate. By varying dielectric constant of the plate, the deposition rate of the carbon films was controlled. From the oxygen transmission test, the resulting PET coated with thin carbon films exhibited high gas barrier property. Using the material with high dielectric constant, we finally synthesized a nearly complete gas barrier films at the deposition rate of 15 sec.

Original language	English
Pages (from-to)	673-678
Number of pages	6
Journal	Journal of Photopolymer Science and Technology
Volume	19
Issue number	5
DOIs	https://doi.org/10.2494/photopolymer.19.673
Publication status	Published - 2006

Keywords

APG plasma
Dielectric constant
Gas barrier

ASJC Scopus subject areas

Polymers and Plastics
Organic Chemistry
Materials Chemistry

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10.2494/photopolymer.19.673

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abstract = "Amorphous carbon films were synthesized on top of polyethylene terephthalate (PET) substrates using atmospheric-pressure glow (APG) plasma CVD equipment which we originally designed and set up. Plasma was generated between two metal electrodes one of which was covered with a dielectric plate. By varying dielectric constant of the plate, the deposition rate of the carbon films was controlled. From the oxygen transmission test, the resulting PET coated with thin carbon films exhibited high gas barrier property. Using the material with high dielectric constant, we finally synthesized a nearly complete gas barrier films at the deposition rate of 15 sec.",

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author = "Hideyuki Kodama and Satoshi Iizumi and Masaki Nakaya and Akira Shirakura and Atsushi Hotta and Tetsuya Suzuki",

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AU - Kodama, Hideyuki

AU - Iizumi, Satoshi

AU - Nakaya, Masaki

AU - Shirakura, Akira

AU - Hotta, Atsushi

AU - Suzuki, Tetsuya

PY - 2006

Y1 - 2006

N2 - Amorphous carbon films were synthesized on top of polyethylene terephthalate (PET) substrates using atmospheric-pressure glow (APG) plasma CVD equipment which we originally designed and set up. Plasma was generated between two metal electrodes one of which was covered with a dielectric plate. By varying dielectric constant of the plate, the deposition rate of the carbon films was controlled. From the oxygen transmission test, the resulting PET coated with thin carbon films exhibited high gas barrier property. Using the material with high dielectric constant, we finally synthesized a nearly complete gas barrier films at the deposition rate of 15 sec.

AB - Amorphous carbon films were synthesized on top of polyethylene terephthalate (PET) substrates using atmospheric-pressure glow (APG) plasma CVD equipment which we originally designed and set up. Plasma was generated between two metal electrodes one of which was covered with a dielectric plate. By varying dielectric constant of the plate, the deposition rate of the carbon films was controlled. From the oxygen transmission test, the resulting PET coated with thin carbon films exhibited high gas barrier property. Using the material with high dielectric constant, we finally synthesized a nearly complete gas barrier films at the deposition rate of 15 sec.

KW - APG plasma

KW - Dielectric constant

KW - Gas barrier

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Properties of amorphous carbon films synthesized by atmospheric pressure glow plasma CVD method

Abstract

Keywords

ASJC Scopus subject areas

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