Property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature

Yoshinori Matsumoto, Makoto Ishida

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

This paper shows the systematic study on the property of plasma-polymerized fluorocarbon (PPFC) film formed by a capacitive coupling-type plasma polymerization equipment using a mixture of CH4/C4F8 gas. The thermal stability of PPFC film was improved with substrate temperature. CH4 gas was supplied with C4F8 gas in order to increase the deposition rate. The deposition rate of a few nanometers per minute was obtained at substrate temperature of 200 °C by the addition of 20% CH4 gas. The PPFC film showed residual thickness of 80% and water contact angle of 110° even after 20 min annealing at 350 °C in air. The electrical breakdown strength of the film was measured as 0.7-1.3 MV/cm using mercury probe. The PPFC film was effective to prevent `in-use stiction', whose effect was confirmed by a touching test using the electrostatic force for an SOI accelerometer. As another interesting phenomenon, ultra hydrophobic surface (its water contact angle was over 150°) was obtained using the `powder-like' PPFC film, and it was explained by a fractal theory.

Original languageEnglish
Pages (from-to)179-185
Number of pages7
JournalSensors and Actuators, A: Physical
Volume83
Issue number1
DOIs
Publication statusPublished - 2000 May 22

Fingerprint

Fluorocarbons
fluorocarbons
Plasmas
Substrates
Gases
Deposition rates
gases
Temperature
Contact angle
temperature
stiction
Stiction
Plasma polymerization
Electrostatic force
SOI (semiconductors)
accelerometers
surface water
Mercury
Surface waters
Accelerometers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature. / Matsumoto, Yoshinori; Ishida, Makoto.

In: Sensors and Actuators, A: Physical, Vol. 83, No. 1, 22.05.2000, p. 179-185.

Research output: Contribution to journalArticle

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