Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method

Hidetoshi Takahashi, S. Hirakawa, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 μN and torque resolution under 1.0 nNm.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1089-1092
Number of pages4
ISBN (Electronic)9781479989553
DOIs
Publication statusPublished - 2015 Aug 5
Externally publishedYes
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 2015 Jun 212015 Jun 25

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period15/6/2115/6/25

Fingerprint

Chemical elements
Doping (additives)
torque
Torque
probes
sensors
Sensors

Keywords

  • Force sensor
  • Multi-axis
  • Piezoresistive
  • Probe

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Takahashi, H., Hirakawa, S., Takahata, T., Matsumoto, K., & Shimoyama, I. (2015). Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 1089-1092). [7181116] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181116

Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method. / Takahashi, Hidetoshi; Hirakawa, S.; Takahata, T.; Matsumoto, K.; Shimoyama, I.

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1089-1092 7181116 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takahashi, H, Hirakawa, S, Takahata, T, Matsumoto, K & Shimoyama, I 2015, Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181116, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 1089-1092, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 15/6/21. https://doi.org/10.1109/TRANSDUCERS.2015.7181116
Takahashi H, Hirakawa S, Takahata T, Matsumoto K, Shimoyama I. Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1089-1092. 7181116. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). https://doi.org/10.1109/TRANSDUCERS.2015.7181116
Takahashi, Hidetoshi ; Hirakawa, S. ; Takahata, T. ; Matsumoto, K. ; Shimoyama, I. / Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1089-1092 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).
@inproceedings{1ad380815816425e92d9aac9bd625927,
title = "Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method",
abstract = "This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 μN and torque resolution under 1.0 nNm.",
keywords = "Force sensor, Multi-axis, Piezoresistive, Probe",
author = "Hidetoshi Takahashi and S. Hirakawa and T. Takahata and K. Matsumoto and I. Shimoyama",
year = "2015",
month = "8",
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181116",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1089--1092",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

}

TY - GEN

T1 - Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method

AU - Takahashi, Hidetoshi

AU - Hirakawa, S.

AU - Takahata, T.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2015/8/5

Y1 - 2015/8/5

N2 - This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 μN and torque resolution under 1.0 nNm.

AB - This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 μN and torque resolution under 1.0 nNm.

KW - Force sensor

KW - Multi-axis

KW - Piezoresistive

KW - Probe

UR - http://www.scopus.com/inward/record.url?scp=84955456277&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84955456277&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2015.7181116

DO - 10.1109/TRANSDUCERS.2015.7181116

M3 - Conference contribution

T3 - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

SP - 1089

EP - 1092

BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

ER -