Quartz crystal microbalance (QCM) sensor for NH3 gas with the compensation of the humidity drift

Yoshimitsu Ushimi, Yoshihiro Ito, Hideya Horiuchi, Michio Kadota, Yoshimi Nozaki, Yoshio Hotta, Seimei Shiratori

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

QCM sensor coated by a sensing film has been studied as a gas-sensing device with high gas selectivity and high sensor sensitivity. One of the problems to be solved for practical applications is that a resonance frequency of QCM sensor drifts due to the influence of humidity. In this study, we investigated a compensation method of the humidity drift of QCM sensor for NH3 gas by using the element coated by the reference film, that was prepared by modifying the phosphate group of zirconium phosphate of the sensing film with sodium hydroxide. The response properties of the reference element were measured. The results showed good agreement with the humidity response of the sensor element without reacting to ammonia gas. It was found that the compensation of the humidity drift was successfully accomplished by calculating the frequency difference between the sensor element and the reference element. The application to small QCM (1.3×0.9 mm) was also presented.

Original languageEnglish
JournalIEEJ Transactions on Sensors and Micromachines
Volume133
Issue number6
DOIs
Publication statusPublished - 2013

Fingerprint

Quartz crystal microbalances
Atmospheric humidity
Sensors
Gases
Phosphates
Zirconium
Compensation and Redress
Ammonia
Sodium

Keywords

  • Ammonia
  • Compensation of the humidity drift
  • Gas sensor
  • QCM

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Quartz crystal microbalance (QCM) sensor for NH3 gas with the compensation of the humidity drift. / Ushimi, Yoshimitsu; Ito, Yoshihiro; Horiuchi, Hideya; Kadota, Michio; Nozaki, Yoshimi; Hotta, Yoshio; Shiratori, Seimei.

In: IEEJ Transactions on Sensors and Micromachines, Vol. 133, No. 6, 2013.

Research output: Contribution to journalArticle

Ushimi, Yoshimitsu ; Ito, Yoshihiro ; Horiuchi, Hideya ; Kadota, Michio ; Nozaki, Yoshimi ; Hotta, Yoshio ; Shiratori, Seimei. / Quartz crystal microbalance (QCM) sensor for NH3 gas with the compensation of the humidity drift. In: IEEJ Transactions on Sensors and Micromachines. 2013 ; Vol. 133, No. 6.
@article{07dd0deee3af4579bff0a119af269835,
title = "Quartz crystal microbalance (QCM) sensor for NH3 gas with the compensation of the humidity drift",
abstract = "QCM sensor coated by a sensing film has been studied as a gas-sensing device with high gas selectivity and high sensor sensitivity. One of the problems to be solved for practical applications is that a resonance frequency of QCM sensor drifts due to the influence of humidity. In this study, we investigated a compensation method of the humidity drift of QCM sensor for NH3 gas by using the element coated by the reference film, that was prepared by modifying the phosphate group of zirconium phosphate of the sensing film with sodium hydroxide. The response properties of the reference element were measured. The results showed good agreement with the humidity response of the sensor element without reacting to ammonia gas. It was found that the compensation of the humidity drift was successfully accomplished by calculating the frequency difference between the sensor element and the reference element. The application to small QCM (1.3×0.9 mm) was also presented.",
keywords = "Ammonia, Compensation of the humidity drift, Gas sensor, QCM",
author = "Yoshimitsu Ushimi and Yoshihiro Ito and Hideya Horiuchi and Michio Kadota and Yoshimi Nozaki and Yoshio Hotta and Seimei Shiratori",
year = "2013",
doi = "10.1541/ieejsmas.133.184",
language = "English",
volume = "133",
journal = "IEEJ Transactions on Sensors and Micromachines",
issn = "1341-8939",
publisher = "The Institute of Electrical Engineers of Japan",
number = "6",

}

TY - JOUR

T1 - Quartz crystal microbalance (QCM) sensor for NH3 gas with the compensation of the humidity drift

AU - Ushimi, Yoshimitsu

AU - Ito, Yoshihiro

AU - Horiuchi, Hideya

AU - Kadota, Michio

AU - Nozaki, Yoshimi

AU - Hotta, Yoshio

AU - Shiratori, Seimei

PY - 2013

Y1 - 2013

N2 - QCM sensor coated by a sensing film has been studied as a gas-sensing device with high gas selectivity and high sensor sensitivity. One of the problems to be solved for practical applications is that a resonance frequency of QCM sensor drifts due to the influence of humidity. In this study, we investigated a compensation method of the humidity drift of QCM sensor for NH3 gas by using the element coated by the reference film, that was prepared by modifying the phosphate group of zirconium phosphate of the sensing film with sodium hydroxide. The response properties of the reference element were measured. The results showed good agreement with the humidity response of the sensor element without reacting to ammonia gas. It was found that the compensation of the humidity drift was successfully accomplished by calculating the frequency difference between the sensor element and the reference element. The application to small QCM (1.3×0.9 mm) was also presented.

AB - QCM sensor coated by a sensing film has been studied as a gas-sensing device with high gas selectivity and high sensor sensitivity. One of the problems to be solved for practical applications is that a resonance frequency of QCM sensor drifts due to the influence of humidity. In this study, we investigated a compensation method of the humidity drift of QCM sensor for NH3 gas by using the element coated by the reference film, that was prepared by modifying the phosphate group of zirconium phosphate of the sensing film with sodium hydroxide. The response properties of the reference element were measured. The results showed good agreement with the humidity response of the sensor element without reacting to ammonia gas. It was found that the compensation of the humidity drift was successfully accomplished by calculating the frequency difference between the sensor element and the reference element. The application to small QCM (1.3×0.9 mm) was also presented.

KW - Ammonia

KW - Compensation of the humidity drift

KW - Gas sensor

KW - QCM

UR - http://www.scopus.com/inward/record.url?scp=84880070471&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84880070471&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.133.184

DO - 10.1541/ieejsmas.133.184

M3 - Article

AN - SCOPUS:84880070471

VL - 133

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 6

ER -