Quartz crystal microbalance sensor for NH<inf>3</inf> gas with compensation of humidity drift

Yoshimitsu Ushimi, Yoshihiro Ito, Hideya Horiuchi, Michio Kadota, Yoshimi Nozaki, Yoshio Hotta, Seimei Shiratori

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A quartz crystal microbalance (QCM) sensor coated with a sensing film has been studied as a gas-sensing device with high gas selectivity and high sensor sensitivity. One of the problems to be solved for practical applications is that the resonant frequency of a QCM sensor drifts due to the influence of humidity. We investigated a method for compensating the humidity drift of a QCM sensor for NH<inf>3</inf> gas by using an element coated with a reference film that was prepared by modifying the phosphate group of zirconium phosphate in the sensing film with sodium hydroxide. The response characteristics of the reference element were measured. The results showed good agreement with the humidity response of the sensor element when not responding to ammonia gas. It was found that compensation of the humidity drift was successfully accomplished by calculating the frequency difference between the sensor element and the reference element. An application to small QCM (1.3 × 0.9 mm) is also presented.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalElectronics and Communications in Japan
Volume98
Issue number6
DOIs
Publication statusPublished - 2015 Jun 1

Fingerprint

Quartz crystal microbalances
Humidity
quartz crystals
microbalances
humidity
Atmospheric humidity
Crystal
Sensor
sensors
Sensors
Gases
gases
Sensing
Phosphate
phosphates
Phosphates
Ammonia
sodium hydroxides
Resonant Frequency
Selectivity

Keywords

  • ammonia gas
  • ammonia sensor
  • humidity drift
  • odor monitoring
  • quartz crystal microbalance
  • semiconductor gas sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Networks and Communications
  • Physics and Astronomy(all)
  • Signal Processing
  • Applied Mathematics

Cite this

Ushimi, Y., Ito, Y., Horiuchi, H., Kadota, M., Nozaki, Y., Hotta, Y., & Shiratori, S. (2015). Quartz crystal microbalance sensor for NH<inf>3</inf> gas with compensation of humidity drift. Electronics and Communications in Japan, 98(6), 1-7. https://doi.org/10.1002/ecj.11653

Quartz crystal microbalance sensor for NH<inf>3</inf> gas with compensation of humidity drift. / Ushimi, Yoshimitsu; Ito, Yoshihiro; Horiuchi, Hideya; Kadota, Michio; Nozaki, Yoshimi; Hotta, Yoshio; Shiratori, Seimei.

In: Electronics and Communications in Japan, Vol. 98, No. 6, 01.06.2015, p. 1-7.

Research output: Contribution to journalArticle

Ushimi, Y, Ito, Y, Horiuchi, H, Kadota, M, Nozaki, Y, Hotta, Y & Shiratori, S 2015, 'Quartz crystal microbalance sensor for NH<inf>3</inf> gas with compensation of humidity drift', Electronics and Communications in Japan, vol. 98, no. 6, pp. 1-7. https://doi.org/10.1002/ecj.11653
Ushimi, Yoshimitsu ; Ito, Yoshihiro ; Horiuchi, Hideya ; Kadota, Michio ; Nozaki, Yoshimi ; Hotta, Yoshio ; Shiratori, Seimei. / Quartz crystal microbalance sensor for NH<inf>3</inf> gas with compensation of humidity drift. In: Electronics and Communications in Japan. 2015 ; Vol. 98, No. 6. pp. 1-7.
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