Radiofrequency electron swarm transport in reactive gases and plasmas

K. Maeda, T. Makabe

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

This paper gives a historical review of the development of radiofrequency (RF) electron swarm from a theoretical point of view. Also the recent progress of the direct numerical procedure (DNP) for solving the Boltzmann equation will be discussed with some typical examples of the temporally modulated velocity distribution in Ar and HCl in an RF field. The significance of DNP will be demonstrated for an RF swarm in the frequency range from MHz to GHz at strong fields.

Original languageEnglish
Pages (from-to)61-69
Number of pages9
JournalPhysica Scripta
Volume1994
Issue numberT53
DOIs
Publication statusPublished - 1994 Jan 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Mathematical Physics
  • Condensed Matter Physics

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