Radiofrequency electron swarm transport in reactive gases and plasmas

K. Maeda; T. Makabe

doi:10.1088/0031-8949/1994/T53/006

Radiofrequency electron swarm transport in reactive gases and plasmas

K. Maeda, T. Makabe

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31 Citations (Scopus)

Abstract

This paper gives a historical review of the development of radiofrequency (RF) electron swarm from a theoretical point of view. Also the recent progress of the direct numerical procedure (DNP) for solving the Boltzmann equation will be discussed with some typical examples of the temporally modulated velocity distribution in Ar and HCl in an RF field. The significance of DNP will be demonstrated for an RF swarm in the frequency range from MHz to GHz at strong fields.

Original language	English
Pages (from-to)	61-69
Number of pages	9
Journal	Physica Scripta
Volume	1994
Issue number	T53
DOIs	https://doi.org/10.1088/0031-8949/1994/T53/006
Publication status	Published - 1994 Jan 1

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Mathematical Physics
Condensed Matter Physics

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10.1088/0031-8949/1994/T53/006

Cite this

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Radiofrequency electron swarm transport in reactive gases and plasmas

Abstract

ASJC Scopus subject areas

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