Fingerprint Dive into the research topics of 'Rare gas metastable atom density in diluted O <sub>2</sub> RF plasmas'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Rare gas metastable atom density in diluted O 2 RF plasmas
Takeshi Kitajima, Kei Takahashi, Toshiki Nakano, Toshiaki Makabe
Research output: Contribution to journal › Article