Recent nano-precision ductile machining technology for advanced optical applications

Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recent research and development work in the ductile machining technology for semiconductors and crystalline materials is reviewed. The latest applications of ductile machining to the fabrication of infrared optical elements and semiconductor substrates are introduced.

Original languageEnglish
Title of host publicationOptics InfoBase Conference Papers
PublisherOptical Society of America
ISBN (Print)1557528187, 9781557528186
Publication statusPublished - 2006
Externally publishedYes
EventOptical Fabrication and Testing, OFT 2006 - Rochester, NY, United States
Duration: 2006 Oct 102006 Oct 10

Other

OtherOptical Fabrication and Testing, OFT 2006
CountryUnited States
CityRochester, NY
Period06/10/1006/10/10

Fingerprint

machining
Machining
Semiconductor materials
Optical devices
research and development
Crystalline materials
Infrared radiation
Fabrication
fabrication
Substrates

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Yan, J., & Kuriyagawa, T. (2006). Recent nano-precision ductile machining technology for advanced optical applications. In Optics InfoBase Conference Papers Optical Society of America.

Recent nano-precision ductile machining technology for advanced optical applications. / Yan, Jiwang; Kuriyagawa, Tsunemoto.

Optics InfoBase Conference Papers. Optical Society of America, 2006.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yan, J & Kuriyagawa, T 2006, Recent nano-precision ductile machining technology for advanced optical applications. in Optics InfoBase Conference Papers. Optical Society of America, Optical Fabrication and Testing, OFT 2006, Rochester, NY, United States, 06/10/10.
Yan J, Kuriyagawa T. Recent nano-precision ductile machining technology for advanced optical applications. In Optics InfoBase Conference Papers. Optical Society of America. 2006
Yan, Jiwang ; Kuriyagawa, Tsunemoto. / Recent nano-precision ductile machining technology for advanced optical applications. Optics InfoBase Conference Papers. Optical Society of America, 2006.
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