Recent nano-precision ductile machining technology for advanced optical applications

Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recent research and development work in the ductile machining technology for semiconductors and crystalline materials is reviewed. The latest applications of ductile machining to the fabrication of infrared optical elements and semiconductor substrates are introduced.

Original languageEnglish
Title of host publicationOptical Fabrication and Testing, OFT 2006
PublisherOptical Society of America (OSA)
ISBN (Print)1557528187, 9781557528186
DOIs
Publication statusPublished - 2006
EventOptical Fabrication and Testing, OFT 2006 - Rochester, NY, United States
Duration: 2006 Oct 102006 Oct 10

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherOptical Fabrication and Testing, OFT 2006
CountryUnited States
CityRochester, NY
Period06/10/1006/10/10

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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