Reconstruction in atom probe tomography considering the cone angle of needle-like shaped samples and evaluation of reliability

Tsuyoshi Yukawa, Masato Morita, Masanobu Karasawa, Satoshi Ishimura, Norihito Mayama, Hiroshi Uchida, Yoko Kawamura, Kohei M. Itoh, Masanori Owari

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The present reconstruction method of Atom Probe Tomography (APT) has the problem that the parameter, in particular the shank angle which represents the region the signal of APT is detectable, is adjusted according to the internal length reference of the sample. The reliable APT reconstruction image could not be obtained in the sample without the reference. We propose the method to calculate the value of the shank angle from the shape of sample and the geometric position relationship between the sample and the detector. We compared the APT reconstruction image in this method to the image in the conventional method with the sample of Si isotope superlattice. The result is that APT 3D image by the new method was reconstructed equivalently to the image by the conventional method.

Original languageEnglish
Pages (from-to)235-238
Number of pages4
Journale-Journal of Surface Science and Nanotechnology
Volume13
DOIs
Publication statusPublished - 2015

Keywords

  • APT
  • And manipulation technology
  • Atom probe tomography
  • Measurement
  • Nano-scale imaging
  • Reconstruction method
  • Silicon
  • Superlattices

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Condensed Matter Physics
  • Mechanics of Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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