Reconstruction in atom probe tomography considering the cone angle of needle-like shaped samples and evaluation of reliability

Tsuyoshi Yukawa, Masato Morita, Masanobu Karasawa, Satoshi Ishimura, Norihito Mayama, Hiroshi Uchida, Yoko Kawamura, Kohei M Itoh, Masanori Owari

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The present reconstruction method of Atom Probe Tomography (APT) has the problem that the parameter, in particular the shank angle which represents the region the signal of APT is detectable, is adjusted according to the internal length reference of the sample. The reliable APT reconstruction image could not be obtained in the sample without the reference. We propose the method to calculate the value of the shank angle from the shape of sample and the geometric position relationship between the sample and the detector. We compared the APT reconstruction image in this method to the image in the conventional method with the sample of Si isotope superlattice. The result is that APT 3D image by the new method was reconstructed equivalently to the image by the conventional method.

Original languageEnglish
Pages (from-to)235-238
Number of pages4
Journale-Journal of Surface Science and Nanotechnology
Volume13
DOIs
Publication statusPublished - 2015

Fingerprint

needles
Needles
Tomography
Cones
cones
tomography
Atoms
joints (junctions)
evaluation
probes
atoms
image reconstruction
Image reconstruction
Computer-Assisted Image Processing
Isotopes
isotopes
Detectors
detectors

Keywords

  • And manipulation technology
  • APT
  • Atom probe tomography
  • Measurement
  • Nano-scale imaging
  • Reconstruction method
  • Silicon
  • Superlattices

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Mechanics of Materials
  • Biotechnology
  • Bioengineering

Cite this

Reconstruction in atom probe tomography considering the cone angle of needle-like shaped samples and evaluation of reliability. / Yukawa, Tsuyoshi; Morita, Masato; Karasawa, Masanobu; Ishimura, Satoshi; Mayama, Norihito; Uchida, Hiroshi; Kawamura, Yoko; Itoh, Kohei M; Owari, Masanori.

In: e-Journal of Surface Science and Nanotechnology, Vol. 13, 2015, p. 235-238.

Research output: Contribution to journalArticle

Yukawa, Tsuyoshi ; Morita, Masato ; Karasawa, Masanobu ; Ishimura, Satoshi ; Mayama, Norihito ; Uchida, Hiroshi ; Kawamura, Yoko ; Itoh, Kohei M ; Owari, Masanori. / Reconstruction in atom probe tomography considering the cone angle of needle-like shaped samples and evaluation of reliability. In: e-Journal of Surface Science and Nanotechnology. 2015 ; Vol. 13. pp. 235-238.
@article{624210a40d744d95802142e3cffa0764,
title = "Reconstruction in atom probe tomography considering the cone angle of needle-like shaped samples and evaluation of reliability",
abstract = "The present reconstruction method of Atom Probe Tomography (APT) has the problem that the parameter, in particular the shank angle which represents the region the signal of APT is detectable, is adjusted according to the internal length reference of the sample. The reliable APT reconstruction image could not be obtained in the sample without the reference. We propose the method to calculate the value of the shank angle from the shape of sample and the geometric position relationship between the sample and the detector. We compared the APT reconstruction image in this method to the image in the conventional method with the sample of Si isotope superlattice. The result is that APT 3D image by the new method was reconstructed equivalently to the image by the conventional method.",
keywords = "And manipulation technology, APT, Atom probe tomography, Measurement, Nano-scale imaging, Reconstruction method, Silicon, Superlattices",
author = "Tsuyoshi Yukawa and Masato Morita and Masanobu Karasawa and Satoshi Ishimura and Norihito Mayama and Hiroshi Uchida and Yoko Kawamura and Itoh, {Kohei M} and Masanori Owari",
year = "2015",
doi = "10.1380/ejssnt.2015.235",
language = "English",
volume = "13",
pages = "235--238",
journal = "e-Journal of Surface Science and Nanotechnology",
issn = "1348-0391",
publisher = "Surface Science Society of Japan",

}

TY - JOUR

T1 - Reconstruction in atom probe tomography considering the cone angle of needle-like shaped samples and evaluation of reliability

AU - Yukawa, Tsuyoshi

AU - Morita, Masato

AU - Karasawa, Masanobu

AU - Ishimura, Satoshi

AU - Mayama, Norihito

AU - Uchida, Hiroshi

AU - Kawamura, Yoko

AU - Itoh, Kohei M

AU - Owari, Masanori

PY - 2015

Y1 - 2015

N2 - The present reconstruction method of Atom Probe Tomography (APT) has the problem that the parameter, in particular the shank angle which represents the region the signal of APT is detectable, is adjusted according to the internal length reference of the sample. The reliable APT reconstruction image could not be obtained in the sample without the reference. We propose the method to calculate the value of the shank angle from the shape of sample and the geometric position relationship between the sample and the detector. We compared the APT reconstruction image in this method to the image in the conventional method with the sample of Si isotope superlattice. The result is that APT 3D image by the new method was reconstructed equivalently to the image by the conventional method.

AB - The present reconstruction method of Atom Probe Tomography (APT) has the problem that the parameter, in particular the shank angle which represents the region the signal of APT is detectable, is adjusted according to the internal length reference of the sample. The reliable APT reconstruction image could not be obtained in the sample without the reference. We propose the method to calculate the value of the shank angle from the shape of sample and the geometric position relationship between the sample and the detector. We compared the APT reconstruction image in this method to the image in the conventional method with the sample of Si isotope superlattice. The result is that APT 3D image by the new method was reconstructed equivalently to the image by the conventional method.

KW - And manipulation technology

KW - APT

KW - Atom probe tomography

KW - Measurement

KW - Nano-scale imaging

KW - Reconstruction method

KW - Silicon

KW - Superlattices

UR - http://www.scopus.com/inward/record.url?scp=84930199843&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84930199843&partnerID=8YFLogxK

U2 - 10.1380/ejssnt.2015.235

DO - 10.1380/ejssnt.2015.235

M3 - Article

AN - SCOPUS:84930199843

VL - 13

SP - 235

EP - 238

JO - e-Journal of Surface Science and Nanotechnology

JF - e-Journal of Surface Science and Nanotechnology

SN - 1348-0391

ER -