Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Olav Solgaard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6466
DOIs
Publication statusPublished - 2007
Externally publishedYes
EventMOEMS and Miniaturized Systems VI - San Jose, CA, United States
Duration: 2007 Jan 242007 Jan 25

Other

OtherMOEMS and Miniaturized Systems VI
CountryUnited States
CitySan Jose, CA
Period07/1/2407/1/25

Fingerprint

scanners
microelectromechanical systems
MEMS
Microscopes
Fluorescence
microscopes
wafers
reflectance
Imaging techniques
Silicon
fluorescence
Endoscopy
Confocal microscopy
silicon
Silicon wafers
insulators
Electrostatics
endoscopes
miniaturization
Aluminum

Keywords

  • Dual-axes confocal microscopy
  • Electrostatic actuation
  • Micromirror
  • Scanning confocal microscopy
  • Self-alignment
  • Two-dimensional (2-D) MEMS scanner
  • Vertical comb actuators

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Ra, H., Piyawattanametha, W., Taguchi, Y., & Solgaard, O. (2007). Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6466). [64660G] https://doi.org/10.1117/12.711560

Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. / Ra, Hyejun; Piyawattanametha, Wibool; Taguchi, Yoshihiro; Solgaard, Olav.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6466 2007. 64660G.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ra, H, Piyawattanametha, W, Taguchi, Y & Solgaard, O 2007, Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6466, 64660G, MOEMS and Miniaturized Systems VI, San Jose, CA, United States, 07/1/24. https://doi.org/10.1117/12.711560
Ra H, Piyawattanametha W, Taguchi Y, Solgaard O. Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6466. 2007. 64660G https://doi.org/10.1117/12.711560
Ra, Hyejun ; Piyawattanametha, Wibool ; Taguchi, Yoshihiro ; Solgaard, Olav. / Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6466 2007.
@inproceedings{8fbccbab5e254a57b0103987b4d188c1,
title = "Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope",
abstract = "This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.",
keywords = "Dual-axes confocal microscopy, Electrostatic actuation, Micromirror, Scanning confocal microscopy, Self-alignment, Two-dimensional (2-D) MEMS scanner, Vertical comb actuators",
author = "Hyejun Ra and Wibool Piyawattanametha and Yoshihiro Taguchi and Olav Solgaard",
year = "2007",
doi = "10.1117/12.711560",
language = "English",
isbn = "0819465798",
volume = "6466",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

AU - Ra, Hyejun

AU - Piyawattanametha, Wibool

AU - Taguchi, Yoshihiro

AU - Solgaard, Olav

PY - 2007

Y1 - 2007

N2 - This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

AB - This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

KW - Dual-axes confocal microscopy

KW - Electrostatic actuation

KW - Micromirror

KW - Scanning confocal microscopy

KW - Self-alignment

KW - Two-dimensional (2-D) MEMS scanner

KW - Vertical comb actuators

UR - http://www.scopus.com/inward/record.url?scp=34247327849&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34247327849&partnerID=8YFLogxK

U2 - 10.1117/12.711560

DO - 10.1117/12.711560

M3 - Conference contribution

AN - SCOPUS:34247327849

SN - 0819465798

SN - 9780819465795

VL - 6466

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -