Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra; Wibool Piyawattanametha; Yoshihiro Taguchi; Olav Solgaard

doi:10.1117/12.711560

Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Olav Solgaard

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

Original language	English
Title of host publication	MOEMS and Miniaturized Systems VI
DOIs	https://doi.org/10.1117/12.711560
Publication status	Published - 2007 Apr 30
Externally published	Yes
Event	MOEMS and Miniaturized Systems VI - San Jose, CA, United States Duration: 2007 Jan 24 → 2007 Jan 25

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6466
ISSN (Print)	0277-786X

Other

Other	MOEMS and Miniaturized Systems VI
Country/Territory	United States
City	San Jose, CA
Period	07/1/24 → 07/1/25

Keywords

Dual-axes confocal microscopy
Electrostatic actuation
Micromirror
Scanning confocal microscopy
Self-alignment
Two-dimensional (2-D) MEMS scanner
Vertical comb actuators

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.711560

Cite this

Ra, H, Piyawattanametha, W, Taguchi, Y & Solgaard, O 2007, Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. in MOEMS and Miniaturized Systems VI., 64660G, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6466, MOEMS and Miniaturized Systems VI, San Jose, CA, United States, 07/1/24. https://doi.org/10.1117/12.711560

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title = "Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope",

abstract = "This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.",

keywords = "Dual-axes confocal microscopy, Electrostatic actuation, Micromirror, Scanning confocal microscopy, Self-alignment, Two-dimensional (2-D) MEMS scanner, Vertical comb actuators",

author = "Hyejun Ra and Wibool Piyawattanametha and Yoshihiro Taguchi and Olav Solgaard",

year = "2007",

month = apr,

day = "30",

doi = "10.1117/12.711560",

language = "English",

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AU - Ra, Hyejun

AU - Piyawattanametha, Wibool

AU - Taguchi, Yoshihiro

AU - Solgaard, Olav

PY - 2007/4/30

Y1 - 2007/4/30

N2 - This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

AB - This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

KW - Dual-axes confocal microscopy

KW - Electrostatic actuation

KW - Micromirror

KW - Scanning confocal microscopy

KW - Self-alignment

KW - Two-dimensional (2-D) MEMS scanner

KW - Vertical comb actuators

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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T2 - MOEMS and Miniaturized Systems VI

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Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

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