Repairing damage on ground fused silica by CO2 laser irradiation

Peng Yao, Takuro Abe, Nobuhito Yoshihara, Tianfeng Zhou, Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)


Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness

Original languageEnglish
Title of host publicationAdvances in Abrasive Technology XIII
Number of pages6
Publication statusPublished - 2010
Externally publishedYes
Event13th International Symposium on Advances in Abrasive Technology, ISAAT2010 - Taipei, Taiwan, Province of China
Duration: 2010 Sep 192010 Sep 22

Publication series

NameAdvanced Materials Research
ISSN (Print)1022-6680


Other13th International Symposium on Advances in Abrasive Technology, ISAAT2010
Country/TerritoryTaiwan, Province of China


  • Brittle mode
  • CO laser irradiation
  • Ductile mode
  • Fused silica
  • Subsurface damage

ASJC Scopus subject areas

  • Engineering(all)


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