Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa, Toshiaki Makabe, Takeshi Shibagaki, Nobuhiko Nakano, Zoran Lj Petrovic, Takeki Kogawa, Akihiko Itoh

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

Original languageEnglish
Pages (from-to)1890-1893
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume35
Issue number3
DOIs
Publication statusPublished - 1996 Mar

Keywords

  • Computered tomography
  • Inductively coupled plasma
  • Net excitation rate

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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