Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa, Toshiaki Makabe, Takeshi Shibagaki, Nobuhiko Nakano, Zoran Lj Petrovic, Takeki Kogawa, Akihiko Itoh

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

Original languageEnglish
Pages (from-to)1890-1893
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume35
Issue number3
Publication statusPublished - 1996 Mar

Fingerprint

Inductively coupled plasma
robots
Tomography
light emission
Flow of gases
Energy dissipation
tomography
reactors
Robots
Plasmas
Gases
gas pressure
gas flow
coils
dissipation
profiles
excitation

Keywords

  • Computered tomography
  • Inductively coupled plasma
  • Net excitation rate

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

Cite this

Robot assisted optical emission tomography in an inductively coupled plasma reactor. / Okigawa, Akifumi; Makabe, Toshiaki; Shibagaki, Takeshi; Nakano, Nobuhiko; Petrovic, Zoran Lj; Kogawa, Takeki; Itoh, Akihiko.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 35, No. 3, 03.1996, p. 1890-1893.

Research output: Contribution to journalArticle

Okigawa, Akifumi ; Makabe, Toshiaki ; Shibagaki, Takeshi ; Nakano, Nobuhiko ; Petrovic, Zoran Lj ; Kogawa, Takeki ; Itoh, Akihiko. / Robot assisted optical emission tomography in an inductively coupled plasma reactor. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 1996 ; Vol. 35, No. 3. pp. 1890-1893.
@article{ddcaa10014794617905e93fd5d502caf,
title = "Robot assisted optical emission tomography in an inductively coupled plasma reactor",
abstract = "The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.",
keywords = "Computered tomography, Inductively coupled plasma, Net excitation rate",
author = "Akifumi Okigawa and Toshiaki Makabe and Takeshi Shibagaki and Nobuhiko Nakano and Petrovic, {Zoran Lj} and Takeki Kogawa and Akihiko Itoh",
year = "1996",
month = "3",
language = "English",
volume = "35",
pages = "1890--1893",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "3",

}

TY - JOUR

T1 - Robot assisted optical emission tomography in an inductively coupled plasma reactor

AU - Okigawa, Akifumi

AU - Makabe, Toshiaki

AU - Shibagaki, Takeshi

AU - Nakano, Nobuhiko

AU - Petrovic, Zoran Lj

AU - Kogawa, Takeki

AU - Itoh, Akihiko

PY - 1996/3

Y1 - 1996/3

N2 - The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

AB - The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

KW - Computered tomography

KW - Inductively coupled plasma

KW - Net excitation rate

UR - http://www.scopus.com/inward/record.url?scp=0030101959&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030101959&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0030101959

VL - 35

SP - 1890

EP - 1893

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 3

ER -