Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets

Teruaki Motooka, Paul Fons, Hiroshi Abe, Takashi Tokuyama

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6 Citations (Scopus)


Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.

Original languageEnglish
Pages (from-to)L879-L882
JournalJapanese journal of applied physics
Issue number6 B
Publication statusPublished - 1993 Jun
Externally publishedYes


  • Electron impact
  • Quadrupole mass spectrometry
  • Silicon
  • Supersonic free jet

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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