Self-organized van der Waals epitaxy of layered chalcogenide structures

Yuta Saito, Paul Fons, Alexander V. Kolobov, Junji Tominaga

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

Highly oriented Sb2Te3 films were successfully deposited by RF-magnetron sputtering on both crystalline and amorphous substrates. A novel deposition mechanism and method are proposed based on van der Waals epitaxy. Due to the selective reactivity of the top surface atoms of the substrate with sputtered atoms, a Te monolayer is the first layer formed on the substrate, resulting in the subsequent layer-by-layer growth of the Sb2Te3 film independent of the crystallinity of the substrates. We believe that this method can be applied to the mass production of a wide range of various van der Waals solids, such as transition metal dichalcogenides and topological insulators for future electronics devices. Self-organized van-der-Waals epitaxy was proposed as a possible growth mechanism of highly-oriented layered chalcogenide materials, like Sb2Te3, by sputtering. It was found that depending on the composition of the substrate, there existed a selectivity of the chemical reaction between the film and substrate elements that resulted in the preferential formation of a Te monolayer and subsequent layer-by-layer growth of Sb2Te3. This novel mechanism enables one to fabricate highly-oriented chalcogenide films over a large area and can be applied to the mass production of a wide range of various van-der-Waals solids, such as transition metal dichalcogenides and topological insulators for future electronics devices.

Original languageEnglish
Pages (from-to)2151-2158
Number of pages8
JournalPhysica Status Solidi (B) Basic Research
Volume252
Issue number10
DOIs
Publication statusPublished - 2015 Oct

Keywords

  • Layered chalcogenides
  • Sb2Te3
  • Self-organized growth
  • Sputtering
  • Topological insulators
  • Van der Waals epitaxy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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