Sensing technology of micro tool edge position by using the total internal reflection of laser

Masaaki Nakazawa; Yasuhiro Kakinuma; Tojiro Aoyama

Sensing technology of micro tool edge position by using the total internal reflection of laser

Masaaki Nakazawa, Yasuhiro Kakinuma, Tojiro Aoyama

Research output: Contribution to conference › Paper › peer-review

Abstract

Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

Original language	English
Publication status	Published - 2007 Dec 1
Event	4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan Duration: 2007 Nov 7 → 2007 Nov 9

Other

Other	4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
Country/Territory	Japan
City	Fukuoka
Period	07/11/7 → 07/11/9

Keywords

μ-TAS
Glass
Micro tool
Sensing
Total internal reflection

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

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title = "Sensing technology of micro tool edge position by using the total internal reflection of laser",

abstract = "Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.",

keywords = "μ-TAS, Glass, Micro tool, Sensing, Total internal reflection",

author = "Masaaki Nakazawa and Yasuhiro Kakinuma and Tojiro Aoyama",

year = "2007",

month = dec,

day = "1",

language = "English",

note = "4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 ; Conference date: 07-11-2007 Through 09-11-2007",

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TY - CONF

T1 - Sensing technology of micro tool edge position by using the total internal reflection of laser

AU - Nakazawa, Masaaki

AU - Kakinuma, Yasuhiro

AU - Aoyama, Tojiro

PY - 2007/12/1

Y1 - 2007/12/1

N2 - Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

AB - Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

KW - μ-TAS

KW - Glass

KW - Micro tool

KW - Sensing

KW - Total internal reflection

UR - http://www.scopus.com/inward/record.url?scp=84883318890&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883318890&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84883318890

T2 - 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007

Y2 - 7 November 2007 through 9 November 2007

ER -

Sensing technology of micro tool edge position by using the total internal reflection of laser

Abstract

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Keywords

ASJC Scopus subject areas

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