Sensing technology of micro tool edge position by using the total internal reflection of laser

Masaaki Nakazawa, Yasuhiro Kakinuma, Tojiro Aoyama

Research output: Contribution to conferencePaper

Abstract

Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

Original languageEnglish
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
Duration: 2007 Nov 72007 Nov 9

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
CountryJapan
CityFukuoka
Period07/11/707/11/9

Keywords

  • μ-TAS
  • Glass
  • Micro tool
  • Sensing
  • Total internal reflection

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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    Nakazawa, M., Kakinuma, Y., & Aoyama, T. (2007). Sensing technology of micro tool edge position by using the total internal reflection of laser. Paper presented at 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007, Fukuoka, Japan.