Sensing technology of micro tool edge position by using the total internal reflection of laser

Masaaki Nakazawa, Yasuhiro Kakinuma, Tojiro Aoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

Original languageEnglish
Title of host publicationLEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings
Publication statusPublished - 2007
Event4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
Duration: 2007 Nov 72007 Nov 9

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
CountryJapan
CityFukuoka
Period07/11/707/11/9

Fingerprint

Glass
Lasers
Micromachining
Laser beams

Keywords

  • μ-TAS
  • Glass
  • Micro tool
  • Sensing
  • Total internal reflection

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Nakazawa, M., Kakinuma, Y., & Aoyama, T. (2007). Sensing technology of micro tool edge position by using the total internal reflection of laser. In LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings

Sensing technology of micro tool edge position by using the total internal reflection of laser. / Nakazawa, Masaaki; Kakinuma, Yasuhiro; Aoyama, Tojiro.

LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakazawa, M, Kakinuma, Y & Aoyama, T 2007, Sensing technology of micro tool edge position by using the total internal reflection of laser. in LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007, Fukuoka, Japan, 07/11/7.
Nakazawa M, Kakinuma Y, Aoyama T. Sensing technology of micro tool edge position by using the total internal reflection of laser. In LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007
Nakazawa, Masaaki ; Kakinuma, Yasuhiro ; Aoyama, Tojiro. / Sensing technology of micro tool edge position by using the total internal reflection of laser. LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007.
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