Sensitivity enhancement of a cantilever-type airflow shear stress sensor via surface roughness modification

R. Kazama, Hidetoshi Takahashi, N. Thanh-Vinh, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports an airflow shear stress sensor whose sensitivity is enhanced by modifying the surface roughness. The sensor consists of a cantilever-typed shear stress sensor and a micro pillar array on the surface of the cantilever. Piezoresistors are formed on the side walls of the cantilever's hinges to detect the shear force acting on the cantilever. When a shear airflow is applied to the proposed sensor, the shear force is generated on the surface of not only the cantilever but also the micro pillar array. Therefore, for the same airflow velocity, the total shear force acting on the surface of the proposed sensor is larger than that acting on the surface of a sensor with a flat surface. The experimental results show that the micro pillar structure improves the sensor sensitivity in response to airflow by 5 times compared with the flat surface structure.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages839-842
Number of pages4
ISBN (Electronic)9781509019731
DOIs
Publication statusPublished - 2016 Feb 26
Externally publishedYes
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 242016 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Kazama, R., Takahashi, H., Thanh-Vinh, N., Takahata, T., Matsumoto, K., & Shimoyama, I. (2016). Sensitivity enhancement of a cantilever-type airflow shear stress sensor via surface roughness modification. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 839-842). [7421760] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421760