Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports an acoustic sensor using a Helmholtz resonator (HR) array and a MEMS differential pressure (DP) sensor element. A piezoresistive cantilever type DP sensor is highly sensitive to acoustic waves around its mechanical resonant frequency (RF). By attaching a HR array of which RF is equal to the cantilever in front of the DP sensor like a cap, the sensitivity is enhanced at the RF. The developed sensor with the HR responded with 3 times higher sensitivity than without the HR, and realized a resolution of approximately 2 mPa without an electrical lock-in filter.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherIEEE Computer Society
Pages833-836
Number of pages4
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 2022 Jan 92022 Jan 13

Publication series

NameIEEE Symposium on Mass Storage Systems and Technologies
Volume2022-January
ISSN (Print)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period22/1/922/1/13

Keywords

  • Acoustic sensor
  • Helmholtz resonator array
  • Piezoresitive cantilever

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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