Shape adaptive grinding of CVD silicon carbide

Anthony Beaucamp, Yoshiharu Namba, Herman Combrinck, Phillip Charlton, Richard Freeman

Research output: Contribution to journalArticlepeer-review


Because of the direct relationship between removal rate and surface roughness in conventional grinding, ultra-precision finishing of hard coatings produced by chemical vapour deposition (CVD) usually involves several process steps with fixed and loose abrasives. In this paper, an innovative shape adaptive grinding (SAG) tool is introduced that allows finishing of CVD silicon carbide with roughness below 0.4 nm Ra and high removal rates up-to 100 mm 3/min. The SAG tool elastically complies with freeform surfaces, while rigidity at small scales allows grinding to occur. Since material removal is time dependent, this process can improve form error iteratively through feed moderation.

Original languageEnglish
Pages (from-to)317-320
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Issue number1
Publication statusPublished - 2014
Externally publishedYes


  • Grinding
  • Silicon carbide
  • Ultra-precision

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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