Shape adaptive grinding of CVD silicon carbide

Anthony Beaucamp; Yoshiharu Namba; Herman Combrinck; Phillip Charlton; Richard Freeman

doi:10.1016/j.cirp.2014.03.019

Shape adaptive grinding of CVD silicon carbide

Anthony Beaucamp, Yoshiharu Namba, Herman Combrinck, Phillip Charlton, Richard Freeman

Research output: Contribution to journal › Article › peer-review

Abstract

Because of the direct relationship between removal rate and surface roughness in conventional grinding, ultra-precision finishing of hard coatings produced by chemical vapour deposition (CVD) usually involves several process steps with fixed and loose abrasives. In this paper, an innovative shape adaptive grinding (SAG) tool is introduced that allows finishing of CVD silicon carbide with roughness below 0.4 nm Ra and high removal rates up-to 100 mm ³/min. The SAG tool elastically complies with freeform surfaces, while rigidity at small scales allows grinding to occur. Since material removal is time dependent, this process can improve form error iteratively through feed moderation.

Original language	English
Pages (from-to)	317-320
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	63
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2014.03.019
Publication status	Published - 2014
Externally published	Yes

Keywords

Grinding
Silicon carbide
Ultra-precision

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/j.cirp.2014.03.019

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title = "Shape adaptive grinding of CVD silicon carbide",

abstract = "Because of the direct relationship between removal rate and surface roughness in conventional grinding, ultra-precision finishing of hard coatings produced by chemical vapour deposition (CVD) usually involves several process steps with fixed and loose abrasives. In this paper, an innovative shape adaptive grinding (SAG) tool is introduced that allows finishing of CVD silicon carbide with roughness below 0.4 nm Ra and high removal rates up-to 100 mm 3/min. The SAG tool elastically complies with freeform surfaces, while rigidity at small scales allows grinding to occur. Since material removal is time dependent, this process can improve form error iteratively through feed moderation.",

keywords = "Grinding, Silicon carbide, Ultra-precision",

author = "Anthony Beaucamp and Yoshiharu Namba and Herman Combrinck and Phillip Charlton and Richard Freeman",

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AU - Beaucamp, Anthony

AU - Namba, Yoshiharu

AU - Combrinck, Herman

AU - Charlton, Phillip

AU - Freeman, Richard

N1 - Funding Information: This work was supported by JSPS Grant-in-Aid for Scientific Research (B) No. 22360063 , from the Japan Society for the Promotion of Science.

PY - 2014

Y1 - 2014

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AB - Because of the direct relationship between removal rate and surface roughness in conventional grinding, ultra-precision finishing of hard coatings produced by chemical vapour deposition (CVD) usually involves several process steps with fixed and loose abrasives. In this paper, an innovative shape adaptive grinding (SAG) tool is introduced that allows finishing of CVD silicon carbide with roughness below 0.4 nm Ra and high removal rates up-to 100 mm 3/min. The SAG tool elastically complies with freeform surfaces, while rigidity at small scales allows grinding to occur. Since material removal is time dependent, this process can improve form error iteratively through feed moderation.

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KW - Silicon carbide

KW - Ultra-precision

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Shape adaptive grinding of CVD silicon carbide

Abstract

Keywords

ASJC Scopus subject areas

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