Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization

Engineering & Materials Science

• Superlattices 100%
• Secondary ion mass spectrometry 80%
• Isotopes 65%
• Silicon 42%
• Arsenic 31%
• Doping (additives) 23%
• Depth profiling 17%
• Ion implantation 14%
• Ions 9%

Physics & Astronomy

• silicon isotopes 92%
• secondary ion mass spectrometry 55%
• superlattices 50%
• characterization 29%
• arsenic 23%
• ion implantation 9%
• profiles 5%
• ions 4%

Chemical Compounds

• Superlattice 54%
• Isotope 46%
• Doping Material 18%
• Implanted Ion 15%
• Depth Profiling 13%
• Ion Implantation 13%
• Secondary Ion Mass Spectroscopy 11%