TY - JOUR
T1 - Silicon nanoparticle generation and deposition on glass from waste silicon powder by nanosecond pulsed laser irradiation
AU - Momoki, Ko
AU - Manabe, Takeshi
AU - Li, Lin
AU - Yan, Jiwang
N1 - Funding Information:
This study has been financially supported by Japan Society for the Promotion of Science, Grant-in-Aid for Exploratory Research, 17K18833 (2017–2019). Yan and Li are grateful for the Leverhulme Trust (UK), Grant Reference Number VP1-2018-022.
Funding Information:
This study has been financially supported by Japan Society for the Promotion of Science , Grant-in-Aid for Exploratory Research, 17K18833 (2017–2019). Yan and Li are grateful for the Leverhulme Trust (UK), Grant Reference Number VP1-2018-022 .
Publisher Copyright:
© 2020 Elsevier Ltd
PY - 2020/6/1
Y1 - 2020/6/1
N2 - Silicon nanoparticles can be used for fabricating electrodes in high-performance lithium ion batteries and other high value-added products. Currently, silicon nanoparticles are fabricated by pulsed laser irradiation of single-crystal silicon wafers in water. In this study, we proposed silicon nanoparticle generation by using a nanosecond pulsed laser to irradiate waste silicon powder which is disposed from wire-saw slicing processes of silicon ingots. The laser-induced nanoparticles were backward-transferred and deposited on a glass substrate. It was found that the morphology and amount of the deposited nanoparticles was strongly dependent on the distance between the glass substrate and the waste silicon powder target. Raman spectroscopy showed that the silicon nanoparticles were crystalline, and the average size was ~10 nm. The obtained silicon nanoparticles had high purity, as the diamond abrasives included in the waste silicon powder were removed through oxidation and vaporization during laser irradiation.
AB - Silicon nanoparticles can be used for fabricating electrodes in high-performance lithium ion batteries and other high value-added products. Currently, silicon nanoparticles are fabricated by pulsed laser irradiation of single-crystal silicon wafers in water. In this study, we proposed silicon nanoparticle generation by using a nanosecond pulsed laser to irradiate waste silicon powder which is disposed from wire-saw slicing processes of silicon ingots. The laser-induced nanoparticles were backward-transferred and deposited on a glass substrate. It was found that the morphology and amount of the deposited nanoparticles was strongly dependent on the distance between the glass substrate and the waste silicon powder target. Raman spectroscopy showed that the silicon nanoparticles were crystalline, and the average size was ~10 nm. The obtained silicon nanoparticles had high purity, as the diamond abrasives included in the waste silicon powder were removed through oxidation and vaporization during laser irradiation.
KW - Nanoparticle
KW - Nanosecond pulsed laser
KW - Raman spectroscopy
KW - Silicon crystal
KW - Waste silicon powder
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U2 - 10.1016/j.mssp.2020.104998
DO - 10.1016/j.mssp.2020.104998
M3 - Article
AN - SCOPUS:85079342177
SN - 1369-8001
VL - 111
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
M1 - 104998
ER -
