Simulation of Magnetron Plasma

Eiji Shidoji, Toshiaki Makabe

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)767-772
Number of pages6
JournalShinku/Journal of the Vacuum Society of Japan
Volume43
Issue number8
DOIs
Publication statusPublished - 2000

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Plasmas

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Simulation of Magnetron Plasma. / Shidoji, Eiji; Makabe, Toshiaki.

In: Shinku/Journal of the Vacuum Society of Japan, Vol. 43, No. 8, 2000, p. 767-772.

Research output: Contribution to journalArticle

Shidoji, Eiji ; Makabe, Toshiaki. / Simulation of Magnetron Plasma. In: Shinku/Journal of the Vacuum Society of Japan. 2000 ; Vol. 43, No. 8. pp. 767-772.
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