Simulation of Magnetron Plasma

Eiji Shidoji, Toshiaki Makabe

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)767-772
Number of pages6
JournalShinku/Journal of the Vacuum Society of Japan
Volume43
Issue number8
DOIs
Publication statusPublished - 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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