Simulation of the effect of arsenic discrete distribution on device characteristics in silicon nanowire transistors

Masashi Uematsu, Kohei M. Itoh, Gennady Mil'Nikov, Hideki Minari, Nobuya Mori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds