Simulations of rf glow discharges in SF6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher

Nobuhiko Nakano, Naohiko Shimura, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

106 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Simulations of rf glow discharges in SF6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher'. Together they form a unique fingerprint.

Mathematics

Physics & Astronomy