Simulations of rf glow discharges in SF6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher

Nobuhiko Nakano, Naohiko Shimura, Zoran Lj Petrović, Toshiaki Makabe

Research output: Contribution to journal › Article › peer-review

106 Citations (Scopus)

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Mathematics

Physics & Astronomy