Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever

Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 μm × 200 μm × 0.29 μm. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 × 10 -3 (m/s)-1 from 0 to 2.5 m s-1. When a particle of 35 μm diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 × 10-3 (m/s)-1 when the airflow velocity varied between 0 and 2.5 m s-1.

Original languageEnglish
Article number025107
JournalMeasurement Science and Technology
Volume24
Issue number2
DOIs
Publication statusPublished - 2013 Jan 1
Externally publishedYes

Fingerprint

Cantilever
Micro-electro-mechanical Systems
particle collisions
microelectromechanical systems
MEMS
Collision
collisions
Fractional
Reverberation
sensitivity
sensors
Sensors
reverberation
Sensor
Resonance Frequency
Directly proportional
pulses
Resistance

Keywords

  • airflow
  • cantilever
  • MEMS
  • particle collision

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

Cite this

Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever. / Takahashi, Hidetoshi; Kan, Tetsuo; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Measurement Science and Technology, Vol. 24, No. 2, 025107, 01.01.2013.

Research output: Contribution to journalArticle

@article{4ef5ae1ec98044c0a476acea663410f9,
title = "Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever",
abstract = "This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 μm × 200 μm × 0.29 μm. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 × 10 -3 (m/s)-1 from 0 to 2.5 m s-1. When a particle of 35 μm diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 × 10-3 (m/s)-1 when the airflow velocity varied between 0 and 2.5 m s-1.",
keywords = "airflow, cantilever, MEMS, particle collision",
author = "Hidetoshi Takahashi and Tetsuo Kan and Kiyoshi Matsumoto and Isao Shimoyama",
year = "2013",
month = "1",
day = "1",
doi = "10.1088/0957-0233/24/2/025107",
language = "English",
volume = "24",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "IOP Publishing Ltd.",
number = "2",

}

TY - JOUR

T1 - Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever

AU - Takahashi, Hidetoshi

AU - Kan, Tetsuo

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2013/1/1

Y1 - 2013/1/1

N2 - This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 μm × 200 μm × 0.29 μm. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 × 10 -3 (m/s)-1 from 0 to 2.5 m s-1. When a particle of 35 μm diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 × 10-3 (m/s)-1 when the airflow velocity varied between 0 and 2.5 m s-1.

AB - This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 μm × 200 μm × 0.29 μm. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 × 10 -3 (m/s)-1 from 0 to 2.5 m s-1. When a particle of 35 μm diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 × 10-3 (m/s)-1 when the airflow velocity varied between 0 and 2.5 m s-1.

KW - airflow

KW - cantilever

KW - MEMS

KW - particle collision

UR - http://www.scopus.com/inward/record.url?scp=84872692102&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84872692102&partnerID=8YFLogxK

U2 - 10.1088/0957-0233/24/2/025107

DO - 10.1088/0957-0233/24/2/025107

M3 - Article

AN - SCOPUS:84872692102

VL - 24

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 2

M1 - 025107

ER -