SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
PublisherOSA - The Optical Society
VolumePart F122-CLEOPR 2017
ISBN (Electronic)9781557528209
Publication statusPublished - 2017 Jan 1
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore
Duration: 2017 Jul 312017 Aug 4

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
CountrySingapore
CitySingapore
Period17/7/3117/8/4

Fingerprint

Photolithography
Photonic crystals
Demonstrations
Silicon
Electrooptical effects
Photodetectors
Modulators
Fabrication

Keywords

  • Components
  • Electro-optic devices
  • Integrated optics
  • Optical signal processing
  • Opto-electronics
  • Photonic crystal

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Daud, N. A. B., Ooka, Y., Tabata, T., Tetsumoto, T., & Tanabe, T. (2017). SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 (Vol. Part F122-CLEOPR 2017). [s2277] OSA - The Optical Society.

SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography. / Daud, Nurul Ashikin Binti; Ooka, Yuta; Tabata, Tomohisa; Tetsumoto, Tomohiro; Tanabe, Takasumi.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. Vol. Part F122-CLEOPR 2017 OSA - The Optical Society, 2017. s2277.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Daud, NAB, Ooka, Y, Tabata, T, Tetsumoto, T & Tanabe, T 2017, SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. vol. Part F122-CLEOPR 2017, s2277, OSA - The Optical Society, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017, Singapore, Singapore, 17/7/31.
Daud NAB, Ooka Y, Tabata T, Tetsumoto T, Tanabe T. SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. Vol. Part F122-CLEOPR 2017. OSA - The Optical Society. 2017. s2277
Daud, Nurul Ashikin Binti ; Ooka, Yuta ; Tabata, Tomohisa ; Tetsumoto, Tomohiro ; Tanabe, Takasumi. / SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. Vol. Part F122-CLEOPR 2017 OSA - The Optical Society, 2017.
@inproceedings{203f2b5e87f54457950a6b6e4dcf974d,
title = "SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography",
abstract = "We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.",
keywords = "Components, Electro-optic devices, Integrated optics, Optical signal processing, Opto-electronics, Photonic crystal",
author = "Daud, {Nurul Ashikin Binti} and Yuta Ooka and Tomohisa Tabata and Tomohiro Tetsumoto and Takasumi Tanabe",
year = "2017",
month = "1",
day = "1",
language = "English",
volume = "Part F122-CLEOPR 2017",
booktitle = "Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017",
publisher = "OSA - The Optical Society",

}

TY - GEN

T1 - SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

AU - Daud, Nurul Ashikin Binti

AU - Ooka, Yuta

AU - Tabata, Tomohisa

AU - Tetsumoto, Tomohiro

AU - Tanabe, Takasumi

PY - 2017/1/1

Y1 - 2017/1/1

N2 - We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

AB - We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

KW - Components

KW - Electro-optic devices

KW - Integrated optics

KW - Optical signal processing

KW - Opto-electronics

KW - Photonic crystal

UR - http://www.scopus.com/inward/record.url?scp=85059506415&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85059506415&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85059506415

VL - Part F122-CLEOPR 2017

BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017

PB - OSA - The Optical Society

ER -