SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

    Original languageEnglish
    Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
    PublisherOSA - The Optical Society
    VolumePart F122-CLEOPR 2017
    ISBN (Electronic)9781557528209
    Publication statusPublished - 2017 Jan 1
    EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore
    Duration: 2017 Jul 312017 Aug 4

    Other

    OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
    CountrySingapore
    CitySingapore
    Period17/7/3117/8/4

    Keywords

    • Components
    • Electro-optic devices
    • Integrated optics
    • Optical signal processing
    • Opto-electronics
    • Photonic crystal

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Mechanics of Materials

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