Size parameter effect of dielectric small particle mediated nano-hole patterning on silicon wafer by femtosecond laser

Tetsuo Sakai, Yuto Tanaka, Yuji Nishizawa, Mitsuhiro Terakawa, Minoru Obara

    Research output: Contribution to journal › Article › peer-review

    23 Citations (Scopus)

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    Engineering & Materials Science

    Chemical Compounds