Small&High-Sensitive Three Axis Soi Capacitive Accelerometer

Yasumasa Yamaguchi; Fumiharu Katsumata; Fumihiko Nishida; Masaaki Nishimura; Yoshinori Matsumoto; Makoto Ishida

doi:10.1541/ieejsmas.121.362

Small&High-Sensitive Three Axis Soi Capacitive Accelerometer

Yasumasa Yamaguchi, Fumiharu Katsumata, Fumihiko Nishida, Masaaki Nishimura, Yoshinori Matsumoto, Makoto Ishida

Department of Applied Physics and Physico-Informatics

Research output: Contribution to journal › Article › peer-review

Abstract

The three axis SOI capacitive accelerometer has been developed using silicon bulk micro- machining. The accelerometer has a glass-silicon structure measuring 2.8mm by 2.8mm by 1.0mm. The accelerometer has a 500μsilicon mass formed by dicing using a SOI substrate. The accelerometer structure was released by R.I.E. process so that the sensor did not break or stick to the substrate. This process promises high throughput and high yield. The accelerometer was assembled with a switched-capasitor circuit and the characteristics were evaluated. The typical characteristics are as follows; Acceleration range is ± 1.2G, sensitivity is 0.6V/G, cross-axis sensitivity is less than 7%.

Original language	English
Pages (from-to)	362-366
Number of pages	5
Journal	ieej transactions on sensors and micromachines
Volume	121
Issue number	7
DOIs	https://doi.org/10.1541/ieejsmas.121.362
Publication status	Published - 2001

Keywords

SOI
accelerometer
capacitive
dicing saw
three axis

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1541/ieejsmas.121.362

Cite this

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title = "Small&High-Sensitive Three Axis Soi Capacitive Accelerometer",

abstract = "The three axis SOI capacitive accelerometer has been developed using silicon bulk micro- machining. The accelerometer has a glass-silicon structure measuring 2.8mm by 2.8mm by 1.0mm. The accelerometer has a 500μsilicon mass formed by dicing using a SOI substrate. The accelerometer structure was released by R.I.E. process so that the sensor did not break or stick to the substrate. This process promises high throughput and high yield. The accelerometer was assembled with a switched-capasitor circuit and the characteristics were evaluated. The typical characteristics are as follows; Acceleration range is ± 1.2G, sensitivity is 0.6V/G, cross-axis sensitivity is less than 7%.",

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AU - Katsumata, Fumiharu

AU - Nishida, Fumihiko

AU - Nishimura, Masaaki

AU - Matsumoto, Yoshinori

AU - Ishida, Makoto

PY - 2001

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Small&High-Sensitive Three Axis Soi Capacitive Accelerometer

Abstract

Keywords

ASJC Scopus subject areas

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