Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films

Munehiro Tada, Shinobu Fujihara, Toshio Kimura

Research output: Contribution to journalArticle

59 Citations (Scopus)

Abstract

Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.

Original languageEnglish
Pages (from-to)1610-1616
Number of pages7
JournalJournal of Materials Research
Volume14
Issue number4
Publication statusPublished - 1999 Apr

Fingerprint

Trifluoroacetic acid
Trifluoroacetic Acid
Fluorides
Rare earths
Sol-gels
fluorides
Rare Earth Metals
rare earth elements
Earth (planet)
gels
Thin films
acids
2-Propanol
Fluorine
silica glass
stirring
sol-gel processes
Fused silica
thin films
Processing

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films. / Tada, Munehiro; Fujihara, Shinobu; Kimura, Toshio.

In: Journal of Materials Research, Vol. 14, No. 4, 04.1999, p. 1610-1616.

Research output: Contribution to journalArticle

@article{b443cf78d11b41af86cf4ccb8d17aed3,
title = "Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films",
abstract = "Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.",
author = "Munehiro Tada and Shinobu Fujihara and Toshio Kimura",
year = "1999",
month = "4",
language = "English",
volume = "14",
pages = "1610--1616",
journal = "Journal of Materials Research",
issn = "0884-2914",
publisher = "Materials Research Society",
number = "4",

}

TY - JOUR

T1 - Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films

AU - Tada, Munehiro

AU - Fujihara, Shinobu

AU - Kimura, Toshio

PY - 1999/4

Y1 - 1999/4

N2 - Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.

AB - Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.

UR - http://www.scopus.com/inward/record.url?scp=0032626079&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032626079&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0032626079

VL - 14

SP - 1610

EP - 1616

JO - Journal of Materials Research

JF - Journal of Materials Research

SN - 0884-2914

IS - 4

ER -