Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films

Munehiro Tada, Shinobu Fujihara, Toshio Kimura

Research output: Contribution to journalArticle

60 Citations (Scopus)

Abstract

Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.

Original languageEnglish
Pages (from-to)1610-1616
Number of pages7
JournalJournal of Materials Research
Volume14
Issue number4
DOIs
Publication statusPublished - 1999 Apr

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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