Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Satoshi Hirao, Yuichiro Hayashi, Toshiaki Makabe

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.

Original languageEnglish
Pages (from-to)1410-1411
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36
Issue number4 PART 1
DOIs
Publication statusPublished - 2008 Aug

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optical emission spectroscopy
charge coupled devices
cameras

Keywords

  • E-H transition
  • Inductively coupled plasmas(ICPs)
  • Optical emission spectroscopy (OES)

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Space-and time-resolved E-H transition in an inductively coupled plasma in Ar. / Hirao, Satoshi; Hayashi, Yuichiro; Makabe, Toshiaki.

In: IEEE Transactions on Plasma Science, Vol. 36, No. 4 PART 1, 08.2008, p. 1410-1411.

Research output: Contribution to journalArticle

Hirao, Satoshi ; Hayashi, Yuichiro ; Makabe, Toshiaki. / Space-and time-resolved E-H transition in an inductively coupled plasma in Ar. In: IEEE Transactions on Plasma Science. 2008 ; Vol. 36, No. 4 PART 1. pp. 1410-1411.
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