Abstract
Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
| Original language | English |
|---|---|
| Pages (from-to) | 1410-1411 |
| Number of pages | 2 |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 36 |
| Issue number | 4 PART 1 |
| DOIs | |
| Publication status | Published - 2008 Aug |
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Keywords
- E-H transition
- Inductively coupled plasmas(ICPs)
- Optical emission spectroscopy (OES)
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Condensed Matter Physics
Cite this
Space-and time-resolved E-H transition in an inductively coupled plasma in Ar. / Hirao, Satoshi; Hayashi, Yuichiro; Makabe, Toshiaki.
In: IEEE Transactions on Plasma Science, Vol. 36, No. 4 PART 1, 08.2008, p. 1410-1411.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Space-and time-resolved E-H transition in an inductively coupled plasma in Ar
AU - Hirao, Satoshi
AU - Hayashi, Yuichiro
AU - Makabe, Toshiaki
PY - 2008/8
Y1 - 2008/8
N2 - Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
AB - Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
KW - E-H transition
KW - Inductively coupled plasmas(ICPs)
KW - Optical emission spectroscopy (OES)
UR - http://www.scopus.com/inward/record.url?scp=50249136694&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50249136694&partnerID=8YFLogxK
U2 - 10.1109/TPS.2008.924551
DO - 10.1109/TPS.2008.924551
M3 - Article
AN - SCOPUS:50249136694
VL - 36
SP - 1410
EP - 1411
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
SN - 0093-3813
IS - 4 PART 1
ER -