Abstract
Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
Original language | English |
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Pages (from-to) | 1410-1411 |
Number of pages | 2 |
Journal | IEEE Transactions on Plasma Science |
Volume | 36 |
Issue number | 4 PART 1 |
DOIs | |
Publication status | Published - 2008 Aug 1 |
Keywords
- E-H transition
- Inductively coupled plasmas(ICPs)
- Optical emission spectroscopy (OES)
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics