Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.
- E-H transition
- Inductively coupled plasmas(ICPs)
- Optical emission spectroscopy (OES)
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics