Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Satoshi Hirao, Yuichiro Hayashi, Toshiaki Makabe

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.

Original languageEnglish
Pages (from-to)1410-1411
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36
Issue number4 PART 1
DOIs
Publication statusPublished - 2008 Aug 1

Keywords

  • E-H transition
  • Inductively coupled plasmas(ICPs)
  • Optical emission spectroscopy (OES)

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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