Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Satoshi Hirao; Yuichiro Hayashi; Toshiaki Makabe

doi:10.1109/TPS.2008.924551

Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Satoshi Hirao, Yuichiro Hayashi, Toshiaki Makabe

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p₁) shows the temporal change of the active area for the plasma production as a function of time.

Original language	English
Pages (from-to)	1410-1411
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	36
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/TPS.2008.924551
Publication status	Published - 2008 Aug
Externally published	Yes

Keywords

E-H transition
Inductively coupled plasmas(ICPs)
Optical emission spectroscopy (OES)

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

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10.1109/TPS.2008.924551

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title = "Space-and time-resolved E-H transition in an inductively coupled plasma in Ar",

abstract = "Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.",

keywords = "E-H transition, Inductively coupled plasmas(ICPs), Optical emission spectroscopy (OES)",

author = "Satoshi Hirao and Yuichiro Hayashi and Toshiaki Makabe",

year = "2008",

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doi = "10.1109/TPS.2008.924551",

language = "English",

volume = "36",

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AU - Hirao, Satoshi

AU - Hayashi, Yuichiro

AU - Makabe, Toshiaki

PY - 2008/8

Y1 - 2008/8

N2 - Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.

AB - Optical emission spectroscopy by an intensified charge coupled device camera is employed to investigate a temporal transition from E- to H-mode in an inductively coupled plasma in Ar. The axially integrated 2-D emission image of Ar (2p1) shows the temporal change of the active area for the plasma production as a function of time.

KW - E-H transition

KW - Inductively coupled plasmas(ICPs)

KW - Optical emission spectroscopy (OES)

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DO - 10.1109/TPS.2008.924551

M3 - Article

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JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 4 PART 1

ER -

Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

Abstract

Keywords

ASJC Scopus subject areas

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