Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

Tomihito Ohba, Toshiaki Makabe

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

When a pair of short- and long-lived excited molecules are coupled with an upper radiative state, it will be possible to derive the number density of the long-lived species from the optical emission spectroscopy of upper-level short-lived species by careful selection of the pair. Two-dimensional density distributions of the long-lived metastable state Ar (1 s5) and that of the short-lived excited state Ar (2 p2) are observed and compared in the time-averaged form, using a computerized tomography technique of the emissions from a pair of optical transitions in a two-frequency capacitively coupled plasma in pure Ar.

Original languageEnglish
Article number111501
JournalApplied Physics Letters
Volume96
Issue number11
DOIs
Publication statusPublished - 2010

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optical emission spectroscopy
optical transition
metastable state
light emission
density distribution
spatial distribution
tomography
excitation
molecules

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines. / Ohba, Tomihito; Makabe, Toshiaki.

In: Applied Physics Letters, Vol. 96, No. 11, 111501, 2010.

Research output: Contribution to journalArticle

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