Spatiotemporal optical emission spectroscopy of rf discharges in SF 6

Zoran Lj Petrović, Fumiyoshi Tochikubo, Shigeru Kakuta, Toshiaki Makabe

Research output: Contribution to journalArticle

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Abstract

Space- and time-resolved emission spectroscopy was applied to obtain information on the kinetics of radio-frequency (rf) discharges for 100 kHz, 800 kHz, and 13.56 MHz in SF6. Emission lines of fluorine and SF x radical were used, but particularly useful were the second positive (2+) and the first negative (1-) bands of nitrogen. The two nitrogen bands gave an opportunity to separate, respectively, the behavior of middle-energy (11-20 eV) and higher-energy (above 20 eV) electrons. Development of double layers was studied from the excess emission close to the anode due to an increased electric field. Also observed were the emission from the bulk and emission due to the electrons accelerated in the instantaneous cathode sheath. The development of these features was followed as a function of the pressure, frequency, and power.

Original languageEnglish
Pages (from-to)2163-2172
Number of pages10
JournalJournal of Applied Physics
Volume73
Issue number5
DOIs
Publication statusPublished - 1993

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radio frequency discharge
optical emission spectroscopy
nitrogen
sheaths
fluorine
anodes
electrons
cathodes
electric fields
energy
kinetics
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Petrović, Z. L., Tochikubo, F., Kakuta, S., & Makabe, T. (1993). Spatiotemporal optical emission spectroscopy of rf discharges in SF 6 Journal of Applied Physics, 73(5), 2163-2172. https://doi.org/10.1063/1.353118

Spatiotemporal optical emission spectroscopy of rf discharges in SF 6 . / Petrović, Zoran Lj; Tochikubo, Fumiyoshi; Kakuta, Shigeru; Makabe, Toshiaki.

In: Journal of Applied Physics, Vol. 73, No. 5, 1993, p. 2163-2172.

Research output: Contribution to journalArticle

Petrović, ZL, Tochikubo, F, Kakuta, S & Makabe, T 1993, 'Spatiotemporal optical emission spectroscopy of rf discharges in SF 6 ', Journal of Applied Physics, vol. 73, no. 5, pp. 2163-2172. https://doi.org/10.1063/1.353118
Petrović, Zoran Lj ; Tochikubo, Fumiyoshi ; Kakuta, Shigeru ; Makabe, Toshiaki. / Spatiotemporal optical emission spectroscopy of rf discharges in SF 6 In: Journal of Applied Physics. 1993 ; Vol. 73, No. 5. pp. 2163-2172.
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