Specimen size effect on elastic-plastic strength evaluation of interface between thin films

Chuantong Chen; Kozo Koiwa; Nobuyuki Shishido; Shoji Kamiya; Masaki Omiya; Hisashi Sato; Masahiro Nishida; Takashi Suzuki; Tomoji Nakamura; Takeshi Nokuo; Tadahiro Nagasawa

doi:10.1016/j.engfracmech.2014.08.013

Specimen size effect on elastic-plastic strength evaluation of interface between thin films

Chuantong Chen, Kozo Koiwa, Nobuyuki Shishido, Shoji Kamiya, Masaki Omiya, Hisashi Sato, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Takeshi Nokuo, Tadahiro Nagasawa

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A specimen size effect on the adhesion strength of Cu/insulation layer interface was studied by means of a new elastic-plastic finite element simulation technique. By considering the influence of the plastic zone at the interface crack tip, the adhesion strength appeared almost independent of the specimen size. Since the Cu crystals were far smaller than the specimen dimensions and thus no significant difference should be expected in adhesion strength, it is speculated that an accurate estimation of the plastic zone is essential for micro-scale specimen evaluation.

Original language	English
Pages (from-to)	371-381
Number of pages	11
Journal	Engineering Fracture Mechanics
Volume	131
DOIs	https://doi.org/10.1016/j.engfracmech.2014.08.013
Publication status	Published - 2014 Dec 1

Keywords

Cu metallization systems
Elastic-plastic simulation
Local interface strength
Size effect

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1016/j.engfracmech.2014.08.013

Cite this

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title = "Specimen size effect on elastic-plastic strength evaluation of interface between thin films",

abstract = "A specimen size effect on the adhesion strength of Cu/insulation layer interface was studied by means of a new elastic-plastic finite element simulation technique. By considering the influence of the plastic zone at the interface crack tip, the adhesion strength appeared almost independent of the specimen size. Since the Cu crystals were far smaller than the specimen dimensions and thus no significant difference should be expected in adhesion strength, it is speculated that an accurate estimation of the plastic zone is essential for micro-scale specimen evaluation.",

keywords = "Cu metallization systems, Elastic-plastic simulation, Local interface strength, Size effect",

author = "Chuantong Chen and Kozo Koiwa and Nobuyuki Shishido and Shoji Kamiya and Masaki Omiya and Hisashi Sato and Masahiro Nishida and Takashi Suzuki and Tomoji Nakamura and Takeshi Nokuo and Tadahiro Nagasawa",

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doi = "10.1016/j.engfracmech.2014.08.013",

language = "English",

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TY - JOUR

T1 - Specimen size effect on elastic-plastic strength evaluation of interface between thin films

AU - Chen, Chuantong

AU - Koiwa, Kozo

AU - Shishido, Nobuyuki

AU - Kamiya, Shoji

AU - Omiya, Masaki

AU - Sato, Hisashi

AU - Nishida, Masahiro

AU - Suzuki, Takashi

AU - Nakamura, Tomoji

AU - Nokuo, Takeshi

AU - Nagasawa, Tadahiro

PY - 2014/12/1

Y1 - 2014/12/1

N2 - A specimen size effect on the adhesion strength of Cu/insulation layer interface was studied by means of a new elastic-plastic finite element simulation technique. By considering the influence of the plastic zone at the interface crack tip, the adhesion strength appeared almost independent of the specimen size. Since the Cu crystals were far smaller than the specimen dimensions and thus no significant difference should be expected in adhesion strength, it is speculated that an accurate estimation of the plastic zone is essential for micro-scale specimen evaluation.

AB - A specimen size effect on the adhesion strength of Cu/insulation layer interface was studied by means of a new elastic-plastic finite element simulation technique. By considering the influence of the plastic zone at the interface crack tip, the adhesion strength appeared almost independent of the specimen size. Since the Cu crystals were far smaller than the specimen dimensions and thus no significant difference should be expected in adhesion strength, it is speculated that an accurate estimation of the plastic zone is essential for micro-scale specimen evaluation.

KW - Cu metallization systems

KW - Elastic-plastic simulation

KW - Local interface strength

KW - Size effect

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DO - 10.1016/j.engfracmech.2014.08.013

M3 - Article

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SN - 0013-7944

VL - 131

SP - 371

EP - 381

JO - Engineering Fracture Mechanics

JF - Engineering Fracture Mechanics

ER -

Specimen size effect on elastic-plastic strength evaluation of interface between thin films

Abstract

Keywords

ASJC Scopus subject areas

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