Spectroscopic study of correlation between RF plasma structure and particle dynamics

T. Makabe, T. Kitajima

Research output: Contribution to journalConference article

Abstract

In-situ monitoring both of spatiotemporal structure and of particle growth in radiofrequency discharges at 13.56 MHz, including a sputtered molecule as an initial source of particle dynamics, has been performed by experiments using the spatiotemporally resolved optical emission spectroscopy and Mie Scattering. We investigate two systems, i.e., sputtered (CF2)n in non-reactive Ar, and CHn in reactive CH4(5%)/Ar. The influence of growth and charging of particles on rf plasma structure is discussed. Also simple 1D-time resolved RF plasma structure with temporal particle growth by the Relaxation Continuum model is compared with experimental results.

Original languageEnglish
Pages (from-to)43-49
Number of pages7
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
Publication statusPublished - 1995 Dec 1
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: 1995 Apr 301995 May 5

ASJC Scopus subject areas

  • Environmental Engineering

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