Spectroscopic study of correlation between RF plasma structure and particle dynamics

In-situ monitoring both of spatiotemporal structure and of particle growth in radiofrequency discharges at 13.56 MHz, including a sputtered molecule as an initial source of particle dynamics, has been performed by experiments using the spatiotemporally resolved optical emission spectroscopy and Mie Scattering. We investigate two systems, i.e., sputtered (CF₂)_n in non-reactive Ar, and CH_n in reactive CH₄(5%)/Ar. The influence of growth and charging of particles on rf plasma structure is discussed. Also simple 1D-time resolved RF plasma structure with temporal particle growth by the Relaxation Continuum model is compared with experimental results.