Spectroscopic study of correlation between RF plasma structure and particle dynamics

T. Makabe, T. Kitajima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In-situ monitoring both of spatiotemporal structure and of particle growth in radiofrequency discharges at 13.56 MHz, including a sputtered molecule as an initial source of particle dynamics, has been performed by experiments using the spatiotemporally resolved optical emission spectroscopy and Mie Scattering. We investigate two systems, i.e., sputtered (CF2)n in non-reactive Ar, and CHn in reactive CH4(5%)/Ar. The influence of growth and charging of particles on rf plasma structure is discussed. Also simple 1D-time resolved RF plasma structure with temporal particle growth by the Relaxation Continuum model is compared with experimental results.

Original languageEnglish
Title of host publicationInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
PublisherInst of Environmental Sciences
Pages43-49
Number of pages7
Publication statusPublished - 1995
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: 1995 Apr 301995 May 5

Other

OtherProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences
CityAnaheim, CA, USA
Period95/4/3095/5/5

Fingerprint

Plasmas
Optical emission spectroscopy
Scattering
Molecules
Monitoring
Experiments

ASJC Scopus subject areas

  • Environmental Engineering

Cite this

Makabe, T., & Kitajima, T. (1995). Spectroscopic study of correlation between RF plasma structure and particle dynamics. In Institute of Environmental Sciences - Proceedings, Annual Technical Meeting (pp. 43-49). Inst of Environmental Sciences.

Spectroscopic study of correlation between RF plasma structure and particle dynamics. / Makabe, T.; Kitajima, T.

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences, 1995. p. 43-49.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Makabe, T & Kitajima, T 1995, Spectroscopic study of correlation between RF plasma structure and particle dynamics. in Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences, pp. 43-49, Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences, Anaheim, CA, USA, 95/4/30.
Makabe T, Kitajima T. Spectroscopic study of correlation between RF plasma structure and particle dynamics. In Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences. 1995. p. 43-49
Makabe, T. ; Kitajima, T. / Spectroscopic study of correlation between RF plasma structure and particle dynamics. Institute of Environmental Sciences - Proceedings, Annual Technical Meeting. Inst of Environmental Sciences, 1995. pp. 43-49
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